Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device

Abstract

A device for determining the position of a structure ( 3 ) on an object ( 2 ) in relation to a coordinate system is disclosed. The object ( 2 ) is placed on a measuring table ( 20 ) which is movable in one plane ( 25 a ), wherein a block ( 25 ) defines the plane ( 25 a ). At least one optical arrangement ( 40, 50 ) is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement ( 40, 50 ) comprises an illumination apparatus ( 41, 51 ) for reflected light illumination and/or transmitted light illumination and at least one first or second optical element ( 9 a , 9 b ), wherein at least part of the at least one optical element ( 9 a, 9 b ) extends into the space ( 110 ) between the block ( 25 ) and an optical system support ( 100 ). The block ( 25 ) and/or the optical system support ( 100 ) separates the illumination apparatus ( 41, 51 ) spatially from the plane ( 25 a ) in which the measuring table ( 20 ) is movable.

1 . A use of at least one illumination apparatus in a device for determining the position and/or dimension of at least one structure on an object, wherein the at least one illumination apparatus is provided in the reflected light illumination apparatus and/or the transmitted light illumination apparatus, and that the illumination apparatus provides light for a first optical element and/or light for a second optical element and that at least one system for triggering the illumination light is assigned to the illumination apparatus, wherein the triggering involves switching off of the light emerging from the illumination apparatus. 
     
     
         2 . The use according to  claim 1 , wherein the illumination apparatus comprises as the light source at least one excimer laser or at least one frequency-multiplied solid-state laser or gas laser or at least one excimer lamp as the illumination source. 
     
     
         3 . The use according to  claim 2 , wherein for the reflected light illumination and the transmitted light illumination, a separate illumination apparatus is provided in each case or a single illumination apparatus is provided for both cases. 
     
     
         4 . The use according to  claim 2 , wherein the illumination apparatus comprises at least one light source, a beam attenuator and a shutter and/or an apparatus for speckle reduction and/or at least one homogeniser. 
     
     
         5 . The use according to  claim 2 , wherein the light source of the illumination apparatus has a first and a second outlet and that the light can be divided between a first illumination branch and a second illumination branch. 
     
     
         6 . The use according to  claim 5 , wherein the first illumination branch provides light for reflected light illumination and the second illumination branch provides light for transmitted light illumination. 
     
     
         7 . The use according to  claim 2 , wherein a beam monitor is provided in one outlet of the illumination apparatus.