Assignee
HIROKI TSUTOMU
JP·6 granted patents·2 pending applications·30 citations·filing 2007–2012
Top patents by PatentIndex Score
8 records- 0191US9312153B2Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor elementHIROKI TSUTOMU·Filed 2011·Granted Apr 12, 2016·13 cites·35 claims
- 0283US8562275B2Transfer device and semiconductor processing systemHIROKI TSUTOMU·Filed 2012·Granted Oct 22, 2013·5 cites·8 claims
- 0382US8057153B2Substrate transfer device, substrate processing apparatus and substrate transfer methodHIROKI TSUTOMU·Filed 2007·Granted Nov 15, 2011·8 cites·8 claims
- 0467US9138901B2Transfer device, substrate processing system and posture control unitHIROKI TSUTOMU·Filed 2011·Granted Sep 22, 2015·2 cites·12 claims
- 0562US8590861B2Gate valve and substrate processing apparatus equipped with the sameHIROKI TSUTOMU·Filed 2010·Granted Nov 26, 2013·2 cites·14 claims
- 0647US2012315113A1Substrate holder, substrate transfer apparatus, and substrate processing apparatusHIROKI TSUTOMU·Filed 2011·Application pending·0 cites
- 0737US2012087766A1Transfer moduleHIROKI TSUTOMU·Filed 2010·Application pending·0 cites
- 0830USD704753SSubstrate conveyer for a substrate processing deviceHIROKI TSUTOMU·Filed 2012·Granted May 13, 2014·0 cites·1 claims
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