Substrate holder, substrate transfer apparatus, and substrate processing apparatus

Abstract

In the substrate holder, while holding a periphery portion of a semiconductor wafer, some of protruding portions having a grass shape on a pad main body hide beneath the semiconductor wafer, and the others of the protruding portions are exposed outside the semiconductor wafer. Also, the protruding portions hiding beneath the semiconductor wafer contact a rear surface of the semiconductor wafer, and sink the semiconductor wafer to a suitable depth via gravity, thereby holding the semiconductor wafer mainly in a length direction. In addition, some of protruding portions exposed near the periphery portion of the semiconductor wafer contact a side surface of the semiconductor wafer, thereby holding the semiconductor wafer mainly in a width direction.

1 . A substrate holder which is attached to a holding surface of a transfer body for transferring a target substrate and holds the substrate by contacting a periphery portion of the substrate, the substrate holder comprising:
 a pad main body which has a plate or block shape and is fixed to the holding surface of the transfer body; and   a plurality of protruding portions which extend from the pad main body and are elastically transformable,   wherein some of the plurality of protruding portions hold a rear surface of the substrate, and other of the protruding portions hold a side surface of the substrate.   
     
     
         2 . A substrate holder which is attached to a holding surface of a transfer body for transferring a target substrate by placing the target substrate to face upward, and holds the substrate by contacting a periphery portion of the substrate, the substrate holder comprising:
 a pad main body which has a plate or block shape and is fixed to the holding surface of the transfer body; and   a plurality of protruding portions which extend upward from a top surface of the pad main body and are elastically transformable,   wherein some of the plurality of protruding portions hold the substrate mainly in a direction perpendicular to a plate surface of the substrate by contacting a rear surface of the substrate, and   other of the protruding portions hold the substrate mainly in a direction parallel to the plate surface of the substrate by contacting a side surface of the substrate.   
     
     
         3 . The substrate holder of  claim 1 , further comprising a spring member at the protruding portion. 
     
     
         4 . The substrate holder of  claim 3 , wherein the spring member is elastically transformably attached to the protruding portion in a direction perpendicular to the holding surface of the transfer body. 
     
     
         5 . The substrate holder of  claim 3 , wherein at least a base portion of the spring member is buried in the pad main body. 
     
     
         6 . The substrate holder of  claim 3 , wherein the protruding portion comprises a cap portion covering a top portion of the spring member. 
     
     
         7 . The substrate holder of  claim 6 , wherein the cap portion comprises a container portion covering a middle portion of the spring member. 
     
     
         8 . The substrate holder of  claim 6 , wherein the cap portion is made of resin. 
     
     
         9 . The substrate holder of  claim 7 , wherein the cap portion is formed of a conductive material and is electrically grounded. 
     
     
         10 . The substrate holder of  claim 6 , wherein a container shape guide portion for guiding the cap portion in a direction perpendicular to the holding surface of the transfer body is provided in the pad main body. 
     
     
         11 . The substrate holder of  claim 6 , wherein the cap portion is provided capable of being displaced in a direction parallel to the holding surface of the transfer body. 
     
     
         12 . The substrate holder of  claim 1 , wherein the pad main body is attached to the inside of a recess portion that is formed on the holding surface of the transfer body. 
     
     
         13 . The substrate holder of  claim 1 , wherein the pad main body is integrally formed to the transfer body. 
     
     
         14 . The substrate holder of  claim 1 , wherein the plurality of protruding portions are arranged at regular intervals on a V-shaped line having a peak facing a center point of the holding surface of the whole transfer body, on the pad main body. 
     
     
         15 . The substrate holder of  claim 1 , wherein the protruding portion is formed in a glass shape or a small thin piece shape. 
     
     
         16 . The substrate holder of  claim 15 , wherein the protruding portion is formed in a scale shape. 
     
     
         17 . The substrate holder of  claim 15 , wherein a leading end portion of the protruding portion is tilted askew with respect to a direction crossing the holding surface of the transfer body at right angles. 
     
     
         18 . The substrate holder of  claim 15 , wherein the protruding portion is formed such that the leading end portion thereof faces the inside of an outline of the substrate placed on the transfer body. 
     
     
         19 . The substrate holder of  claim 15 , wherein elasticity of the protruding portion is provided such that an elastic modulus in a direction parallel to the plate surface of the substrate is higher than an elastic modulus in a direction perpendicular to the plate surface of the substrate, with respect to a force applied from the substrate. 
     
     
         20 . The substrate holder of  claim 1 , wherein a base of the protruding portion is buried in the pad main body. 
     
     
         21 . The substrate holder of  claim 1 , wherein the protruding portion is integrally molded with the pad main body. 
     
     
         22 . The substrate holder of  claim 1 , wherein the protruding portion is made of a rubber-shaped elastic body. 
     
     
         23 . The substrate holder of  claim 22 , wherein the protruding portion is made of fluoro rubber. 
     
     
         24 . The substrate holder of  claim 1 , wherein the protruding portion is made of resin. 
     
     
         25 . The substrate holder of  claim 1 , wherein a depth in which the substrate sinks due to elastic displacement of the protruding portion contacting the rear surface of the substrate is smaller than a thickness of the substrate. 
     
     
         26 . The substrate holder of  claim 1 , wherein the pad main body is provided at a predetermined place of the transfer body such that some of the plurality of protruding portions hide beneath the substrate and the other of the protruding portions are exposed outside the substrate while the pad main body holds the periphery portion of the substrate. 
     
     
         27 . A substrate transfer apparatus for transferring a target substrate, the substrate transfer apparatus comprising:
 a transfer base portion which is configured to be moveable inside a chamber under atmospheric pressure or decompression;   a transfer arm which is loaded on the transfer base portion and configured to support the substrate by placing the substrate on the transfer arm;   an arm driving portion for moving the transfer arm on the transfer base portion in a predetermined direction; and   a substrate holding portion which is attached to the transfer arm to hold the substrate, and comprising the substrate holder of  claim 1 .   
     
     
         28 . The substrate transfer apparatus of  claim 27 , wherein the transfer arm is configured to rotate in a horizontal surface and to advance and retreat in a direction parallel to a radius of a rotating circle. 
     
     
         29 . The substrate transfer apparatus of  claim 27 , wherein the substrate holder is detachably attached to the transfer arm. 
     
     
         30 . A substrate processing apparatus comprising:
 a single type process unit which performs a predetermined process on a target substrate under atmospheric pressure or decompression; and   a substrate transfer mechanism which comprises a transfer arm to which the substrate holder of  claim 1  is attached, places the substrate on the transfer arm, and transfers the substrate to carry the substrate into or out of the process unit.   
     
     
         31 . The substrate processing apparatus of  claim 30 , wherein the substrate holder is detachably attached to the transfer arm.