Inventor · disambiguated record
Tsutomu Hiroki
Also filed as: HIROKI TSUTOMU
42 granted patents·20 pending applications·1,735 citations·filing 1992–2025
98Inventor score
Top patents by PatentIndex Score
62 records- 0198US7837425B2Transportation apparatus and drive mechanismTOKYO ELECTRON LTD·Filed 2004·Granted Nov 23, 2010·1.1k cites·29 claims
- 0297US7706907B2Substrate processing apparatus, substrate processing method, computer program, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Apr 27, 2010·51 cites·21 claims
- 0396US7857569B2Semiconductor processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Dec 28, 2010·35 cites·17 claims
- 0495US6681916B2Transfer system for conveying LCD glass substrateTOKYO ELECTRON LTD·Filed 2001·Granted Jan 27, 2004·64 cites·13 claims
- 0595US5989346ASemiconductor processing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Nov 23, 1999·195 cites·27 claims
- 0691US9406539B2Substrate transfer apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Aug 2, 2016·10 cites·12 claims
- 0791US9312153B2Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor elementHIROKI TSUTOMU·Filed 2011·Granted Apr 12, 2016·13 cites·35 claims
- 0888US7572742B2Equipment and method for processing semiconductorTOKYO ELECTRON LTD·Filed 2005·Granted Aug 11, 2009·13 cites·19 claims
- 0987US10502508B2System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control methodTOKYO ELECTRON LTD·Filed 2015·Granted Dec 10, 2019·5 cites·15 claims
- 1087US7398692B2Sealing ring and its managing systemTOKYO ELECTRON LTD·Filed 2004·Granted Jul 15, 2008·30 cites·19 claims
- 1187US7286890B2Transfer apparatus for target objectTOKYO ELECTRON LTD·Filed 2006·Granted Oct 23, 2007·13 cites·21 claims
- 1286US7637477B2Gate valve apparatus of vacuum processing systemTOKYO ELECTRON LTD·Filed 2005·Granted Dec 29, 2009·11 cites·17 claims
- 1385US6709521B1Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing systemTOKYO ELECTRON LTD·Filed 2000·Granted Mar 23, 2004·33 cites·11 claims
- 1484US9227320B2Transfer device and transfer methodTOKYO ELECTRON LTD·Filed 2014·Granted Jan 5, 2016·6 cites·6 claims
- 1584US5374147ATransfer device for transferring a substrateTOKYO ELECTRON LTD·Filed 1992·Granted Dec 20, 1994·90 cites·10 claims
- 1683US8562275B2Transfer device and semiconductor processing systemHIROKI TSUTOMU·Filed 2012·Granted Oct 22, 2013·5 cites·8 claims
- 1782US9230840B2Substrate transfer device for substrate processing systemTOKYO ELECTRON LTD·Filed 2012·Granted Jan 5, 2016·5 cites·6 claims
- 1882US8057153B2Substrate transfer device, substrate processing apparatus and substrate transfer methodHIROKI TSUTOMU·Filed 2007·Granted Nov 15, 2011·8 cites·8 claims
- 1981US8821644B2Bevel/backside polymer removing method and device, substrate processing apparatus and storage mediumSAKURAGI ISAMU·Filed 2008·Granted Sep 2, 2014·12 cites·7 claims
- 2080US9947564B2Conveyance base and conveyance systemTOKYO ELECTRON LTD·Filed 2013·Granted Apr 17, 2018·4 cites·10 claims
- 2180US9520309B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 13, 2016·4 cites·18 claims
- 2277US11004664B2Heat transfer medium supply system and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted May 11, 2021·2 cites·14 claims
- 2377US8380337B2Vacuum processing apparatus and vacuum transfer apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Feb 19, 2013·5 cites·15 claims
- 2473US9165810B2Conveyance device and substrate processing systemTOKYO ELECTRON LTD·Filed 2012·Granted Oct 20, 2015·3 cites·12 claims
- 2572US10763764B2Stage and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Sep 1, 2020·1 cites·8 claims
- 2671US2025066909A1Seal structure, chamber, substrate processing apparatus, and method of installing seal materialTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2770US6331095B1Transportation system and processing apparatus employing the transportation systemTOKYO ELECTRON LTD·Filed 1999·Granted Dec 18, 2001·38 cites·6 claims
- 2867US9138901B2Transfer device, substrate processing system and posture control unitHIROKI TSUTOMU·Filed 2011·Granted Sep 22, 2015·2 cites·12 claims
- 2966US10658160B2Stage and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 19, 2020·1 cites·3 claims
- 3066US9209055B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Dec 8, 2015·1 cites·4 claims
- 3163US9995378B2Drive device and substrate processing systemTOKYO ELECTRON LTD·Filed 2014·Granted Jun 12, 2018·1 cites·8 claims
- 3263US2025043879A1Valve device, substrate processing apparatus, method of manufacturing valve deviceTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 3362US8590861B2Gate valve and substrate processing apparatus equipped with the sameHIROKI TSUTOMU·Filed 2010·Granted Nov 26, 2013·2 cites·14 claims
- 3462US7281700B2Gate valve apparatus for vacuum processing systemTOKYO ELECTRON LTD·Filed 2006·Granted Oct 16, 2007·2 cites·20 claims
- 3561US7622008B2Gate valve and vacuum container for semiconductor processing systemTOKYO ELECTRON LTD·Filed 2004·Granted Nov 24, 2009·7 cites·12 claims
- 3658US11437259B2Stage, stage manufacturing method, and heat exchangerTOKYO ELECTRON LTD·Filed 2019·Granted Sep 6, 2022·0 cites·14 claims
- 3757US2025207250A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3856US10475686B2Stage, stage manufacturing method, and heat exchangerTOKYO ELECTRON LTD·Filed 2014·Granted Nov 12, 2019·0 cites·12 claims
- 3955US2023094622A1Gate valve, substrate processing system, and method of operating gate valveTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 4055US2025270699A1Valve device, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 4151US7780391B2Substrate processing deviceTOKYO ELECTRON LTD·Filed 2003·Granted Aug 24, 2010·3 cites·11 claims
- 4248US12261060B2Substrate processing apparatus and stage cleaning methodTOKYO ELECTRON LTD·Filed 2020·Granted Mar 25, 2025·0 cites·8 claims
- 4348US2010279014A1Vacuum processing apparatus, vacuum processing method, and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 4447US2011062113A1Substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 4547US2012315113A1Substrate holder, substrate transfer apparatus, and substrate processing apparatusHIROKI TSUTOMU·Filed 2011·Application pending·0 cites
- 4647US2022341033A1Film-forming methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 4746US11139185B2Substrate processing device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2018·Granted Oct 5, 2021·0 cites·6 claims
- 4846US2015012124A1Maintenance System, and Substrate Processing DeviceTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 4946US2015078863A1ConveyorTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 5045US2009184234A1Method for adjusting position of laser emitting deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
Showing the top 50 of 62 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Tsutomu Hiroki files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →