Assignee
KEIL DOUGLAS
US·3 granted patents·1 pending application·23 citations·filing 2006–2011
Top patents by PatentIndex Score
4 records- 0194US10224182B2Mechanical suppression of parasitic plasma in substrate processing chamberKEIL DOUGLAS·Filed 2011·Granted Mar 5, 2019·17 cites·21 claims
- 0282US9111724B2Apparatus and method for controlling plasma potentialKEIL DOUGLAS·Filed 2010·Granted Aug 18, 2015·5 cites·18 claims
- 0360US8849585B2Methods for automatically characterizing a plasmaKEIL DOUGLAS·Filed 2009·Granted Sep 30, 2014·1 cites·9 claims
- 0454US2008006205A1Apparatus and Method for Controlling Plasma PotentialKEIL DOUGLAS·Filed 2006·Application pending·0 cites
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