Assignee
KO SEN-HOU
US·1 granted patent·3 pending applications·4 citations·filing 2006–2013
Top patents by PatentIndex Score
4 records- 0173US8458843B2Apparatus and methods for brush and pad conditioningKO SEN-HOU·Filed 2009·Granted Jun 11, 2013·4 cites·15 claims
- 0242US2007082833A1Low cost and low dishing slurry for polysilicon cmpKO SEN-HOU·Filed 2006·Application pending·0 cites
- 0337US2013185884A1Cleaning module and process for particle reductionKO SEN-HOU·Filed 2013·Application pending·0 cites
- 0434US2013196572A1Conditioning a pad in a cleaning moduleKO SEN-HOU·Filed 2012·Application pending·0 cites
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