Assignee
KOMATSUDA HIDEKI
JP·6 granted patents·3 pending applications·11 citations·filing 2007–2012
Top patents by PatentIndex Score
9 records- 0195US9557548B2Image-forming optical system, exposure apparatus, and device producing methodKOMATSUDA HIDEKI·Filed 2010·Granted Jan 31, 2017·9 cites·37 claims
- 0280US9703204B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusKOMATSUDA HIDEKI·Filed 2011·Granted Jul 11, 2017·2 cites·14 claims
- 0357US9760012B2Illumination deviceKOMATSUDA HIDEKI·Filed 2012·Granted Sep 12, 2017·0 cites·12 claims
- 0451US8467032B2Exposure apparatus and electronic device manufacturing methodKOMATSUDA HIDEKI·Filed 2009·Granted Jun 18, 2013·0 cites·27 claims
- 0548US8081296B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodKOMATSUDA HIDEKI·Filed 2008·Granted Dec 20, 2011·0 cites·18 claims
- 0646US2009040493A1Illumination optical system, illumination optical apparatus, exposure apparatus, and device manufacturing methodKOMATSUDA HIDEKI·Filed 2008·Application pending·0 cites
- 0744US2007273859A1Illumination optical apparatus, exposure apparatus, and device manufacturing methodKOMATSUDA HIDEKI·Filed 2007·Application pending·0 cites
- 0843US8780328B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodKOMATSUDA HIDEKI·Filed 2010·Granted Jul 15, 2014·0 cites·18 claims
- 0938US2011109890A1Light source apparatus, exposure apparatus, and electronic device manufacturing methodKOMATSUDA HIDEKI·Filed 2010·Application pending·0 cites
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