Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus

Abstract

An optical apparatus capable of illuminating an irradiation surface under a required illumination condition capable of achieving a high light efficiency while keeping a small light loss due to, for example, the overlap error of illuminating fields. The optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area.

The invention claimed is: 
     
       1. An optical apparatus used for illuminating a first area with light from a light source, the first area being longer in a second direction intersecting a first direction than in the first direction, the optical apparatus comprising:
 a collector optical member that condenses the light from the light source; 
 a first fly's eye optical member which is provided with a plurality of first optical elements aligned in a first alignment plane in an optical path between the collector optical member and the first area; and 
 a second fly's eye optical member which is provided with a plurality of second optical elements aligned in a second alignment plane in an optical path between the first fly's eye optical member and the first area, wherein 
 the plurality of first optical elements in the first fly's eye optical member each have a profile longer in a fourth direction intersecting a third direction than in the third direction, 
 all of the plurality of first optical elements form an aggregate having a first length in the third direction and all of the plurality of first optical elements form the aggregate having a second length in the fourth direction, the second length being longer than the first length, and 
 the collector optical member forms an illumination area, which is longer in the fourth direction than in the third direction, in the first alignment plane. 
 
     
     
       2. The optical apparatus according to  claim 1 , wherein the third direction corresponds to the first direction, and the fourth direction corresponds to the second direction. 
     
     
       3. The optical apparatus according to  claim 1 , wherein in the first fly's eye optical member, the plurality of first optical elements are aligned such that a number of the first optical elements aligned along the third direction and a number of the first optical element aligned along the fourth direction are different from each other. 
     
     
       4. The optical apparatus according to  claim 1 , wherein the plurality of first optical elements each have a circular arc profile, and the plurality of second optical elements each have a polygonal profile. 
     
     
       5. The optical apparatus according to  claim 4 , wherein the first area has a circular arc profile, the first direction corresponds to a direction in which the plurality of first optical elements are arranged such that the circular arc sides lie next to each other, and the second direction corresponds to a direction in which the plurality of first optical elements are arranged such that the two circular arc ends lie next to each other. 
     
     
       6. The optical apparatus according to  claim 1 , wherein the first fly's eye optical member satisfies such a condition as α is 1.1 or more provided an aspect ratio of the third direction of the aggregate of the aligned first optical elements to the fourth direction of the aggregate is 1 to α. 
     
     
       7. The optical apparatus according to  claim 1 , wherein in the first fly's eye optical member, the aggregate of the aligned first optical elements is longer in the fourth direction than in the third direction by 1.1 times or more. 
     
     
       8. The optical apparatus according to  claim 1 , wherein in the first fly's eye optical member, the aggregate of the first optical elements has the first optical elements aligned in 20 rows or more in the third direction and in 5 rows or more in the fourth direction. 
     
     
       9. The optical apparatus according to  claim 1 , wherein the plurality of first optical elements and the plurality of second optical elements each have the form of a concave-surface reflecting mirror. 
     
     
       10. The optical apparatus according to  claim 1 , wherein in the first fly's eye optical member, at least one of the plurality of first optical elements has an optical surface, the optical surface having surface curvatures along the third direction and along the fourth direction, which are different from each other within the surface perpendicular to the second area. 
     
     
       11. The optical apparatus according to  claim 10 , wherein the surface curvature C 1  of the optical surface along the third direction and the surface curvature C 2  of the optical surface along the fourth direction satisfy the following condition:
   1.0< C 1/ C 2<1.2 or 1.0< C 2/ C 1<1.2. 
 
     
     
       12. The optical apparatus according to  claim 11 , wherein in the second fly's eye optical member, the plurality of second optical elements are aligned in a fifth direction of a third area and in a sixth direction intersecting the fifth direction, and at least one of the plurality of second optical elements has an optical surface, the optical surface having surface curvatures along the fifth direction and along the sixth direction, which are different from each other within the surface perpendicular to the third area. 
     
     
       13. The optical apparatus according to  claim 1 , wherein the light supplied from the light source is EUV light with a wavelength of 5 nm to 20 nm. 
     
     
       14. An exposure apparatus comprising: the optical apparatus according to  claim 1  for illuminating a predetermined pattern formed in the first area, wherein a photosensitive substrate is exposed with the predetermined pattern.