Inventor · disambiguated record
Yoshio Kawabe
Also filed as: KAWABE YOSHIO
17 granted patents·11 pending applications·15 citations·filing 2010–2025
90Inventor score
Top patents by PatentIndex Score
28 records- 0192US11934104B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2022·Granted Mar 19, 2024·1 cites·15 claims
- 0287US2024176248A1Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2024·Application pending·0 cites
- 0384US10831106B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2019·Granted Nov 10, 2020·2 cites·17 claims
- 0483US10025195B2Reflective image-forming optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Jul 17, 2018·3 cites·20 claims
- 0581US9541842B2Reflective image-forming optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2014·Granted Jan 10, 2017·4 cites·19 claims
- 0680US9703204B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusKOMATSUDA HIDEKI·Filed 2011·Granted Jul 11, 2017·2 cites·14 claims
- 0774US2025222539A1Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2025·Application pending·0 cites
- 0872US8497977B2Optical integrator, illumination optical system, exposure apparatus, and device manufacturing methodKAWABE YOSHIO·Filed 2010·Granted Jul 30, 2013·3 cites·27 claims
- 0972US2025121457A1Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2024·Application pending·0 cites
- 1071US11353795B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2020·Granted Jun 7, 2022·0 cites·10 claims
- 1171US2024424601A1Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2024·Application pending·0 cites
- 1270US10976669B2Reflective image-forming optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2020·Granted Apr 13, 2021·0 cites·16 claims
- 1362US2025196261A1Processing apparatusNIKON CORP·Filed 2022·Application pending·0 cites
- 1461US10191387B2Reflective mirror, projection optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Jan 29, 2019·0 cites·12 claims
- 1561US2025010399A1Processing apparatus and processing methodNIKON CORP·Filed 2021·Application pending·0 cites
- 1660US2021205920A1Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2017·Application pending·0 cites
- 1759US10599042B2Reflective image-forming optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2018·Granted Mar 24, 2020·0 cites·21 claims
- 1858US10345708B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2017·Granted Jul 9, 2019·0 cites·18 claims
- 1957US9864278B2Reflective mirror, projection optical system, exposure apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2017·Granted Jan 9, 2018·0 cites·12 claims
- 2052US12157184B2Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2017·Granted Dec 3, 2024·0 cites·19 claims
- 2152US9606447B2Reflective mirror, projection optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Mar 28, 2017·0 cites·30 claims
- 2251US12121991B2Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2017·Granted Oct 22, 2024·0 cites·78 claims
- 2351US2025114860A1Optical processing apparatusNIKON CORP·Filed 2021·Application pending·0 cites
- 2451US2025214177A1Processing apparatusNIKON CORP·Filed 2022·Application pending·0 cites
- 2548US12383981B2Processing apparatus, and manufacturing method of movable bodyNIKON CORP·Filed 2017·Granted Aug 12, 2025·0 cites·22 claims
- 2646US2023341679A1Optical apparatus and processing apparatusNIKON CORP·Filed 2020·Application pending·0 cites
- 2740US9075322B2Reflective imaging optical system, exposure apparatus, and method for producing deviceKAWABE YOSHIO·Filed 2011·Granted Jul 7, 2015·0 cites·49 claims
- 2837US2012188526A1Illumination optical apparatus, exposure apparatus, and device manufacturing methodOSHINO TETSUYA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →