Inventor · disambiguated record
Hideki Komatsuda
Also filed as: KOMATSUDA HIDEKI
48 granted patents·20 pending applications·1,200 citations·filing 1994–2024
98Inventor score
Top patents by PatentIndex Score
68 records- 0198US6452661B1Illumination system and exposure apparatus and methodNIKON CORP·Filed 1999·Granted Sep 17, 2002·167 cites·55 claims
- 0297US6563567B1Method and apparatus for illuminating a surface using a projection imaging apparatusNIKON CORP·Filed 2000·Granted May 13, 2003·143 cites·24 claims
- 0396US6781671B2Imaging optical system and exposure apparatusNIKON CORP·Filed 2002·Granted Aug 24, 2004·55 cites·16 claims
- 0495US9557548B2Image-forming optical system, exposure apparatus, and device producing methodKOMATSUDA HIDEKI·Filed 2010·Granted Jan 31, 2017·9 cites·37 claims
- 0595US7800734B2Lighting apparatus, exposure apparatus and microdevice manufacturing methodNIKON CORP·Filed 2005·Granted Sep 21, 2010·27 cites·16 claims
- 0695US6661499B2Projection exposure apparatus with a catadioptric projection optical systemNIKON CORP·Filed 2002·Granted Dec 9, 2003·64 cites·23 claims
- 0794US6727980B2Apparatus and method for pattern exposure and method for adjusting the apparatusNIKON CORP·Filed 2001·Granted Apr 27, 2004·55 cites·39 claims
- 0893US6590959B2High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other usesNIKON CORP·Filed 2001·Granted Jul 8, 2003·85 cites·28 claims
- 0992US11934104B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2022·Granted Mar 19, 2024·1 cites·15 claims
- 1092US6266389B1Method for manufacturing a device, an exposure apparatus, and a method for manufacturing an exposure apparatusNIKON CORP·Filed 1999·Granted Jul 24, 2001·105 cites·20 claims
- 1192US2025013156A1Image-forming optical system, exposure apparatus, and device producing methodNIKON CORP·Filed 2024·Application pending·0 cites
- 1291US10228623B2Image-forming optical system, exposure apparatus, and device producing methodNIKON CORP·Filed 2018·Granted Mar 12, 2019·2 cites·9 claims
- 1391US6833904B1Exposure apparatus and method of fabricating a micro-device using the exposure apparatusNIKON CORP·Filed 2000·Granted Dec 21, 2004·46 cites·95 claims
- 1489US6466303B1Projection exposure apparatus with a catadioptric projection optical systemNIKON CORP·Filed 1999·Granted Oct 15, 2002·76 cites·59 claims
- 1588US5594526AOptical integrator and projection exposure apparatus using the sameNIKON CORP·Filed 1995·Granted Jan 14, 1997·93 cites·15 claims
- 1687US2024176248A1Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2024·Application pending·0 cites
- 1786US7483122B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2007·Granted Jan 27, 2009·7 cites·3 claims
- 1886US7312851B2Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stopNIKON CORP·Filed 2005·Granted Dec 25, 2007·7 cites·18 claims
- 1986US6049374AIllumination apparatus, a projection exposure apparatus having the same, a method of manufacturing a device using the same, and a method of manufacturing the projection exposure apparatusNIKON CORP·Filed 1998·Granted Apr 11, 2000·61 cites·40 claims
- 2084US12105428B2Image-forming optical system, exposure apparatus, and device producing methodNIKON CORP·Filed 2022·Granted Oct 1, 2024·0 cites·18 claims
- 2184US10831106B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2019·Granted Nov 10, 2020·2 cites·17 claims
- 2284US7446856B2Illumination systems, exposure apparatus, and microdevice-manufacturing methods using sameNIKON CORP·Filed 2005·Granted Nov 4, 2008·6 cites·15 claims
- 2382US7023953B2Illumination system and exposure apparatus and methodNIKON CORP·Filed 2003·Granted Apr 4, 2006·12 cites·20 claims
- 2482US6665051B2Illumination system and exposure apparatus and methodNIKON CORP·Filed 2002·Granted Dec 16, 2003·12 cites·21 claims
- 2580US9703204B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusKOMATSUDA HIDEKI·Filed 2011·Granted Jul 11, 2017·2 cites·14 claims
- 2679US7023523B2Exposure system and exposure methodNIKON CORP·Filed 2005·Granted Apr 4, 2006·5 cites·6 claims
- 2777US11467501B2Image-forming optical system, exposure apparatus, and device producing methodNIKON CORP·Filed 2020·Granted Oct 11, 2022·0 cites·20 claims
- 2875US5615047AIllumination apparatus and exposure apparatus using itNIKON CORP·Filed 1994·Granted Mar 25, 1997·28 cites·12 claims
- 2971US11353795B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2020·Granted Jun 7, 2022·0 cites·10 claims
- 3071US6842500B1Exposure apparatus and exposure method using sameNIKON CORP·Filed 1999·Granted Jan 11, 2005·30 cites·43 claims
- 3170US10866522B2Image-forming optical system, exposure apparatus, and device producing methodNIKON CORP·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 3270US8023103B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Sep 20, 2011·3 cites·46 claims
- 3368US6249382B1Illumination optical system and projection exposure apparatus using sameNIKON CORP·Filed 1999·Granted Jun 19, 2001·31 cites·26 claims
- 3467US9195069B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2007·Granted Nov 24, 2015·2 cites·45 claims
- 3566US10459343B2Illumination deviceNIKON CORP·Filed 2018·Granted Oct 29, 2019·0 cites·21 claims
- 3664US9939733B2Image-forming optical system, exposure apparatus, and device producing methodNIKON CORP·Filed 2016·Granted Apr 10, 2018·0 cites·22 claims
- 3762US10162269B2Illumination deviceNIKON CORP·Filed 2017·Granted Dec 25, 2018·0 cites·18 claims
- 3858US10345708B2Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatusNIKON CORP·Filed 2017·Granted Jul 9, 2019·0 cites·18 claims
- 3957US9760012B2Illumination deviceKOMATSUDA HIDEKI·Filed 2012·Granted Sep 12, 2017·0 cites·12 claims
- 4056US7471456B2Optical integrator, illumination optical device, exposure device, and exposure methodNIKON CORP·Filed 2006·Granted Dec 30, 2008·1 cites·48 claims
- 4155US6819403B2Illumination optical system, exposure apparatus, and microdevice manufacturing methodNIKON CORP·Filed 2002·Granted Nov 16, 2004·4 cites·42 claims
- 4254US5594587AIllumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the sameNIKON CORP·Filed 1995·Granted Jan 14, 1997·15 cites·16 claims
- 4353US6526118B2Projection exposure apparatus and method, and illumination optical system thereofNIKON CORP·Filed 1999·Granted Feb 25, 2003·17 cites·35 claims
- 4451US8467032B2Exposure apparatus and electronic device manufacturing methodKOMATSUDA HIDEKI·Filed 2009·Granted Jun 18, 2013·0 cites·27 claims
- 4551US5713660AIllumination optical apparatusNIKON CORP·Filed 1994·Granted Feb 3, 1998·15 cites·10 claims
- 4650US2009033903A1Illumination systems, exposure apparatus, and microdevice-manufacturing methods using sameNIKON CORP·Filed 2008·Application pending·0 cites
- 4748US8081296B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodKOMATSUDA HIDEKI·Filed 2008·Granted Dec 20, 2011·0 cites·18 claims
- 4847US5790239AIllumination optical apparatus containing an optical integrator and projection exposure apparatus using the sameNIKON CORP·Filed 1996·Granted Aug 4, 1998·12 cites·27 claims
- 4946US2014293254A1Illumination optical device, optical unit, illumination method, and exposure method and deviceNIKON CORP·Filed 2014·Application pending·0 cites
- 5046US2009239178A1Optical attenuator plate, exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2009·Application pending·0 cites
Showing the top 50 of 68 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →