Assignee
KYOUDA HIDEHARU
JP·2 granted patents·1 pending application·2 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0162US8111372B2Coating film forming apparatus and coating film forming method for immersion light exposureKYOUDA HIDEHARU·Filed 2007·Granted Feb 7, 2012·2 cites·11 claims
- 0251US8083959B2Substrate processing method, substrate processing system, and computer-readable storage mediumKYOUDA HIDEHARU·Filed 2007·Granted Dec 27, 2011·0 cites·8 claims
- 0345US2012061021A1Substrate processing method, substrate processing system, and computer-readable storage mediumKYOUDA HIDEHARU·Filed 2011·Application pending·0 cites
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