Assignee
MEMSMART SEMICONDUCTOR CORP
TW·4 granted patents·1 pending application·11 citations·filing 2007–2010
Technology mixB81C5
Top patents by PatentIndex Score
5 records- 0171US7666702B2Method for fabricating a microstructureMEMSMART SEMICONDUCTOR CORP·Filed 2007·Granted Feb 23, 2010·6 cites·7 claims
- 0269US7863063B2Method for fabricating a sealed cavity microstructureMEMSMART SEMICONDUCTOR CORP·Filed 2008·Granted Jan 4, 2011·5 cites·6 claims
- 0350US7935556B2Microelectromechanical system and process of making the sameMEMSMART SEMICONDUCTOR CORP·Filed 2007·Granted May 3, 2011·0 cites·4 claims
- 0443US7829364B2Method of fabricating a suspension microstructureMEMSMART SEMICONDUCTOR CORP·Filed 2008·Granted Nov 9, 2010·0 cites·13 claims
- 0542US2010109121A1Microelectromechanical systemMEMSMART SEMICONDUCTOR CORP·Filed 2010·Application pending·0 cites
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