Assignee
MICRO C TECHNOLOGIES INC
US·8 granted patents·2,054 citations·filing 1996–2000
Top patents by PatentIndex Score
8 records- 0199US6090212ASubstrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrateMICRO C TECHNOLOGIES INC·Filed 1997·Granted Jul 18, 2000·721 cites·53 claims
- 0298US6530994B1Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processingMICRO C TECHNOLOGIES INC·Filed 1999·Granted Mar 11, 2003·416 cites·41 claims
- 0397USRE37546EReactor and method of processing a semiconductor substrateMICRO C TECHNOLOGIES INC·Filed 2000·Granted Feb 12, 2002·201 cites·61 claims
- 0497US5814365AReactor and method of processing a semiconductor substateMICRO C TECHNOLOGIES INC·Filed 1997·Granted Sep 29, 1998·237 cites·42 claims
- 0596US6007635APlatform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processingMICRO C TECHNOLOGIES INC·Filed 1997·Granted Dec 28, 1999·228 cites·24 claims
- 0696US5951896ARapid thermal processing heater technology and method of useMICRO C TECHNOLOGIES INC·Filed 1996·Granted Sep 14, 1999·226 cites·52 claims
- 0779US6310323B1Water cooled support for lamps and rapid thermal processing chamberMICRO C TECHNOLOGIES INC·Filed 2000·Granted Oct 30, 2001·24 cites·53 claims
- 0854US6544339B1Rectilinear wedge geometry for optimal process control in chemical vapor deposition and rapid thermal processingMICRO C TECHNOLOGIES INC·Filed 2000·Granted Apr 8, 2003·1 cites·33 claims
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