Assignee
NEXX SYSTEMS INC
US·5 granted patents·1 pending application·119 citations·filing 2003–2010
Top patents by PatentIndex Score
6 records- 0189US7727366B2Balancing pressure to improve a fluid sealNEXX SYSTEMS INC·Filed 2005·Granted Jun 1, 2010·15 cites·22 claims
- 0289US7445697B2Method and apparatus for fluid processing a workpieceNEXX SYSTEMS INC·Filed 2004·Granted Nov 4, 2008·39 cites·33 claims
- 0388US8038856B2Method and apparatus for fluid processing a workpieceNEXX SYSTEMS INC·Filed 2010·Granted Oct 18, 2011·7 cites·32 claims
- 0488US7100954B2Ultra-thin wafer handling systemNEXX SYSTEMS INC·Filed 2003·Granted Sep 5, 2006·51 cites·37 claims
- 0567US7722747B2Method and apparatus for fluid processing a workpieceNEXX SYSTEMS INC·Filed 2004·Granted May 25, 2010·7 cites·32 claims
- 0645US2011024964A1Substrate processing pallet with coolingNEXX SYSTEMS INC·Filed 2010·Application pending·0 cites
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