Assignee
NISSIN ION EQUIPMENT CO LTD
JP·81 granted patents·32 pending applications·284 citations·filing 2003–2025
Top patents by PatentIndex Score
113 records- 0195US12112915B2Vaporizer, ion source and method for generating aluminum-containing vaporNISSIN ION EQUIPMENT CO LTD·Filed 2022·Granted Oct 8, 2024·2 cites·20 claims
- 0294US11929266B2Wafer supporting deviceNISSIN ION EQUIPMENT CO LTD·Filed 2022·Granted Mar 12, 2024·2 cites·20 claims
- 0390US7635850B2Ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2007·Granted Dec 22, 2009·18 cites·20 claims
- 0490US7498572B2Deflecting electromagnet and ion beam irradiating apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2006·Granted Mar 3, 2009·13 cites·14 claims
- 0588US7098614B2Electrostatic accelerator and ion implanting apparatus with the sameNISSIN ION EQUIPMENT CO LTD·Filed 2003·Granted Aug 29, 2006·31 cites·11 claims
- 0686US8368036B2Ion implantation method and ion implantation apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2009·Granted Feb 5, 2013·13 cites·14 claims
- 0786US2025308833A1Ion source and ion implanter having ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 0884US7718978B2Ion source and method for operating sameNISSIN ION EQUIPMENT CO LTD·Filed 2007·Granted May 18, 2010·8 cites·8 claims
- 0984US2025266231A1Vaporizer, method, and ion source including vaporizerNISSIN ION EQUIPMENT CO LTD·Filed 2025·Application pending·0 cites
- 1083US8994272B2Ion source having at least one electron gun comprising a gas inlet and a plasma region defined by an anode and a ground element thereofNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Mar 31, 2015·5 cites·23 claims
- 1182US9865422B2Plasma generator with at least one non-metallic componentNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Jan 9, 2018·3 cites·9 claims
- 1282US7791041B2Ion source, ion implantation apparatus, and ion implantation methodNISSIN ION EQUIPMENT CO LTD·Filed 2008·Granted Sep 7, 2010·9 cites·20 claims
- 1382US7365339B2Ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2006·Granted Apr 29, 2008·8 cites·10 claims
- 1482US2025071881A1Vaporizer, ion source and method for generating aluminum-containing vaporNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 1581US10600608B1Ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2019·Granted Mar 24, 2020·3 cites·20 claims
- 1681US9142386B2Ion beam lineNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Sep 22, 2015·5 cites·44 claims
- 1781US7605382B2Ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2007·Granted Oct 20, 2009·6 cites·15 claims
- 1879US10916457B2Heating device and semiconductor manufacturing apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2017·Granted Feb 9, 2021·2 cites·17 claims
- 1979US7435976B2Ion beam deviceNISSIN ION EQUIPMENT CO LTD·Filed 2004·Granted Oct 14, 2008·15 cites·25 claims
- 2079US7367139B2Vacuum processing apparatus and method operation thereofNISSIN ION EQUIPMENT CO LTD·Filed 2006·Granted May 6, 2008·7 cites·12 claims
- 2178US11127616B2Substrate accommodation deviceNISSIN ION EQUIPMENT CO LTD·Filed 2020·Granted Sep 21, 2021·2 cites·10 claims
- 2277US9502213B2Ion beam lineNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Nov 22, 2016·2 cites·20 claims
- 2377US7375354B2Ion implanting method and apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2004·Granted May 20, 2008·18 cites·1 claims
- 2476US7148705B2Charging voltage measuring device for substrate and ion beam irradiating deviceNISSIN ION EQUIPMENT CO LTD·Filed 2005·Granted Dec 12, 2006·6 cites·3 claims
- 2576US2026074138A1Ion source and operating method thereofNISSIN ION EQUIPMENT CO LTD·Filed 2025·Application pending·0 cites
- 2675US12328807B2Vaporizer, ion source and method for generating aluminum-containing vaporNISSIN ION EQUIPMENT CO LTD·Filed 2022·Granted Jun 10, 2025·0 cites·20 claims
- 2774US7888652B2Ion implantation apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2007·Granted Feb 15, 2011·3 cites·10 claims
- 2874US7759658B2Ion implanting apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2009·Granted Jul 20, 2010·3 cites·8 claims
- 2974US7755062B2Ion source and ion implantation apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2009·Granted Jul 13, 2010·3 cites·7 claims
- 3073US7085674B2Alarm management method and apparatus thereforNISSIN ION EQUIPMENT CO LTD·Filed 2003·Granted Aug 1, 2006·34 cites·20 claims
- 3172US2026009123A1Vaporizer and ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2025·Application pending·0 cites
- 3271US9230776B2Ion irradiation apparatus and ion irradiation methodNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Jan 5, 2016·2 cites·11 claims
- 3370US11017974B2Ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2017·Granted May 25, 2021·1 cites·19 claims
- 3470US9734982B1Beam current density distribution adjustment device and ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2016·Granted Aug 15, 2017·1 cites·20 claims
- 3570US9275819B2Magnetic field sources for an ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Mar 1, 2016·2 cites·23 claims
- 3669US8664861B1Plasma generatorNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Mar 4, 2014·2 cites·3 claims
- 3769US8017922B2Ion implantation method and apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2004·Granted Sep 13, 2011·12 cites·13 claims
- 3869US8008630B2Ion implantation apparatus and method of correcting deviation angle of ion beamNISSIN ION EQUIPMENT CO LTD·Filed 2007·Granted Aug 30, 2011·2 cites·12 claims
- 3969US7439527B2Ion beam irradiation apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2006·Granted Oct 21, 2008·3 cites·8 claims
- 4068US7772573B2Ion implanting apparatus and method of correcting beam orbitNISSIN ION EQUIPMENT CO LTD·Filed 2009·Granted Aug 10, 2010·2 cites·8 claims
- 4167US2026018449A1Substrate processing apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2025·Application pending·0 cites
- 4266US7436075B2Ion beam irradiation apparatus and ion beam irradiation methodNISSIN ION EQUIPMENT CO LTD·Filed 2005·Granted Oct 14, 2008·2 cites·5 claims
- 4366US2025379022A1Ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 4466US2025299908A1Ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 4565US9190308B2Electrostatic chuck system and semiconductor fabrication deviceNISSIN ION EQUIPMENT CO LTD·Filed 2014·Granted Nov 17, 2015·1 cites·7 claims
- 4664US12340974B2Hydrogen supply device, and ion beam irradiation apparatus equipped therewithNISSIN ION EQUIPMENT CO LTD·Filed 2022·Granted Jun 24, 2025·0 cites·20 claims
- 4764US9728371B2Ion beam scanner for an ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Aug 8, 2017·1 cites·21 claims
- 4864US7078714B2Ion implanting apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2004·Granted Jul 18, 2006·12 cites·18 claims
- 4964US2024331973A1Ion beam irradiation method and ion beam irradiation apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 5063US12272588B2Wafer clamping method and semiconductor manufacturing apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2024·Granted Apr 8, 2025·0 cites·16 claims
Showing the top 50 of 113 patent records by PatentIndex Score.
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