Assignee
NOAH PREC LLC
US·2 granted patents·1 pending application·7 citations·filing 2006–2013
Top patents by PatentIndex Score
3 records- 0158US7849916B2Temperature control apparatus and methodNOAH PREC LLC·Filed 2006·Granted Dec 14, 2010·7 cites·3 claims
- 0242US9679792B2Temperature control system for electrostatic chucks and electrostatic chuck for sameNOAH PREC LLC·Filed 2013·Granted Jun 13, 2017·0 cites·6 claims
- 0338US2015053375A1Multi-loop temperature control system for a semiconductor manufacture processNOAH PREC LLC·Filed 2013·Application pending·0 cites
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