Multi-loop temperature control system for a semiconductor manufacture process

Abstract

A temperature control system for a semiconductor manufacturing process having at least one target includes: a heat exchange loop operatively associated with each target, and a mixing valve operatively associated with each heat exchange loop. This mixing valve has a body defining a mixing chamber. The mixing chamber has an inlet, an outlet, a hot inlet, a cold inlet, and a closure means associated with each inlet. Alternatively, the mixing valve may include: a body defining a mixing chamber, the mixing chamber having an inlet, an outlet, a hot inlet, and a cold inlet, a moveable gate operatively associated with each inlet for controlling the flow of fluid through said inlets, and a motor for moving the gates. A process for manufacturing semiconductors includes the step of providing a temperature control system having at least one target including a mixing valve, as described above.

I claim: 
     
         1 . A temperature control system for a semiconductor manufacturing process having at least one target comprising:
 a heat exchange loop operatively associated with each target, and   a mixing valve operatively associated with each heat exchange loop, said mixing valve having a body defining a mixing chamber, said mixing chamber having an inlet, an outlet, a hot inlet, a cold inlet, and a closure means associated with each inlet.   
     
     
         2 . The temperature control system of  claim 1  further comprising two or more targets. 
     
     
         3 . The temperature control system of  claim 2  further comprising a controller operatively connecting the target and said closure means. 
     
     
         4 . The temperature control system of  claim 3  wherein said controller being adapted to control temperature at the target and/or time at temperature of the target. 
     
     
         5 . The temperature control system of  claim 3  further comprising a temperature sensor at the target. 
     
     
         6 . The temperature control system of  claim 3  further comprising an electronic circuit for operating the closure means. 
     
     
         7 . The temperature control system of  claim 1  further comprising a source of hot heat exchange fluid at a predetermined hot temperature operatively connected to said hot inlet and a source of cold heat exchange fluid at a predetermined cold temperature operatively connected to the cold inlet, the hot temperature being different from the cold temperature. 
     
     
         8 . A mixing valve for a temperature control system for a semiconductor manufacturing process having at least one target comprising:
 a body defining a mixing chamber,   the mixing chamber having an inlet, an outlet, a hot inlet, and a cold inlet,   a moveable gate operatively associated with each inlet for controlling the flow of fluid through said inlets, and   a motor for moving the gates.   
     
     
         9 . The mixing valve according to  claim 8  wherein said motor being a stepper motor, a servomotor, and/or a hydraulic actuator. 
     
     
         10 . The mixing valve of  claim 9  wherein said motor being a stepper motor. 
     
     
         11 . The mixing valve of  claim 8  having more inlets for fluids at different temperatures. 
     
     
         12 . The mixing valve of  claim 8  wherein said gate being associated with each said hot inlet and cold inlet. 
     
     
         13 . The mixing valve of  claim 8  further comprising an arm connecting said motor and said gate. 
     
     
         14 . A process for manufacturing semiconductors by the step of:
 providing a temperature control system having at least one target including a mixing valve operatively associated with each target, the mixing valve having a body defining a mixing chamber, the mixing chamber having an inlet, an outlet, a hot inlet, a cold inlet, and a closure means associated with each inlet.   
     
     
         15 . The process of  claim 14  wherein the temperature control system further comprises a heat exchange loop operatively associated with each target, and the mixing valve being included in the heat exchange loop. 
     
     
         16 . The process of  claim 14  wherein the mixing valve further comprises a body defining a mixing chamber, the mixing chamber having a inlet, an outlet, a hot inlet, and a cold inlet, a moveable gate operatively associated with each inlet for controlling the flow of fluid through said inlets, and a motor for moving the gates. 
     
     
         17 . The process of  claim 16  having more inlets for fluids at different temperatures. 
     
     
         18 . The process of  claim 14  wherein said motor being a stepper motor, a servomotor, linear motor, and/or a hydraulic actuator. 
     
     
         19 . The process of  claim 14  wherein the mixing valve further comprising a temperature sensor at the target. 
     
     
         20 . The process of  claim 14  wherein the mixing valve further comprising an electronic circuit for operating the closure means.