Assignee
NOVA LTD
IL·53 granted patents·28 pending applications·19 citations·filing 2016–2025
Top patents by PatentIndex Score
81 records- 0193US11763181B2Metrology and process control for semiconductor manufacturingNOVA LTD·Filed 2021·Granted Sep 19, 2023·3 cites·20 claims
- 0292US12066385B2Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2022·Granted Aug 20, 2024·1 cites·16 claims
- 0392US11802829B2Method and system for broadband photoreflectance spectroscopyNOVA LTD·Filed 2020·Granted Oct 31, 2023·2 cites·10 claims
- 0492US11740183B2Accurate Raman spectroscopyNOVA LTD·Filed 2020·Granted Aug 29, 2023·2 cites·30 claims
- 0592US2025389665A1Hybrid metrology method and systemNOVA LTD·Filed 2025·Application pending·0 cites
- 0691US11293871B2Raman spectroscopy based measurement systemNOVA LTD·Filed 2018·Granted Apr 5, 2022·3 cites·26 claims
- 0790US12366533B2Hybrid metrology method and systemNOVA LTD·Filed 2024·Granted Jul 22, 2025·0 cites·23 claims
- 0890US2025123210A1Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2024·Application pending·0 cites
- 0989US2025130172A1Accurate raman spectroscopyNOVA LTD·Filed 2024·Application pending·0 cites
- 1088US12467879B2Optical phase measurement method and systemNOVA LTD·Filed 2024·Granted Nov 11, 2025·0 cites·16 claims
- 1188US2025054128A1Method and system for optimizing optical inspection of patterned structuresNOVA LTD·Filed 2024·Application pending·0 cites
- 1287US12163892B2Accurate Raman spectroscopyNOVA LTD·Filed 2023·Granted Dec 10, 2024·0 cites·18 claims
- 1386US12298182B2Optical technique for material characterizationNOVA LTD·Filed 2024·Granted May 13, 2025·0 cites·20 claims
- 1485US12467869B2Raman spectroscopy based measurement systemNOVA LTD·Filed 2024·Granted Nov 11, 2025·0 cites·20 claims
- 1585US12372473B2Accurate Raman spectroscopyNOVA LTD·Filed 2024·Granted Jul 29, 2025·0 cites·18 claims
- 1684US11885737B2Method and system for optical characterization of patterned samplesNOVA LTD·Filed 2020·Granted Jan 30, 2024·1 cites·8 claims
- 1784US11143601B2Test structure design for metrology measurements in patterned samplesNOVA LTD·Filed 2019·Granted Oct 12, 2021·2 cites·8 claims
- 1884US2024337590A1Method and system for optical characterization of patterned samplesNOVA LTD·Filed 2024·Application pending·0 cites
- 1983US11946875B2Optical phase measurement system and methodNOVA LTD·Filed 2022·Granted Apr 2, 2024·0 cites·20 claims
- 2083US2026010081A1Optical metrology system and methodNOVA LTD·Filed 2025·Application pending·0 cites
- 2182US11860104B2Accurate raman spectroscopyNOVA LTD·Filed 2022·Granted Jan 2, 2024·0 cites·19 claims
- 2282US2023401690A1Method and system for optimizing optical inspection of patterned structuresNOVA LTD·Filed 2023·Application pending·0 cites
- 2381US12360462B2Optical metrology system and methodNOVA LTD·Filed 2024·Granted Jul 15, 2025·0 cites·6 claims
- 2481US11927481B2Optical technique for material characterizationNOVA LTD·Filed 2022·Granted Mar 12, 2024·0 cites·22 claims
- 2580US12236364B2Metrology and process control for semiconductor manufacturingNOVA LTD·Filed 2023·Granted Feb 25, 2025·0 cites·18 claims
- 2680US12196691B2X-ray based measurements in patterned structureNOVA LTD·Filed 2023·Granted Jan 14, 2025·0 cites·21 claims
- 2779US12025560B2Hybrid metrology method and systemNOVA LTD·Filed 2021·Granted Jul 2, 2024·0 cites·24 claims
- 2879US2026079049A1Systems and methods for optical metrologyNOVA LTD·Filed 2025·Application pending·0 cites
- 2978US12152993B2Accurate Raman spectroscopyNOVA LTD·Filed 2021·Granted Nov 26, 2024·0 cites·20 claims
- 3078US11906434B2Raman spectroscopy based measurement systemNOVA LTD·Filed 2022·Granted Feb 20, 2024·0 cites·15 claims
- 3177US11906451B2Method and system for non-destructive metrology of thin layersNOVA LTD·Filed 2021·Granted Feb 20, 2024·0 cites·20 claims
- 3276US12321102B2Machine and deep learning methods for spectra-based metrology and process controlNOVA LTD·Filed 2023·Granted Jun 3, 2025·0 cites·18 claims
- 3376US2025334887A1Machine and deep learning methods for spectra-based metrology and process controlNOVA LTD·Filed 2025·Application pending·0 cites
- 3476US2025027767A1Detecting outliers and anomalies for ocd metrology machine learningNOVA LTD·Filed 2024·Application pending·0 cites
- 3575US11150190B2Hybrid metrology method and systemNOVA LTD·Filed 2020·Granted Oct 19, 2021·0 cites·24 claims
- 3675US2025181941A1Metrology and process control for semiconductor manufacturingNOVA LTD·Filed 2025·Application pending·0 cites
- 3774US11710616B2TEM-based metrology method and systemNOVA LTD·Filed 2022·Granted Jul 25, 2023·0 cites·22 claims
- 3874US11639901B2Test structure design for metrology measurements in patterned samplesNOVA LTD·Filed 2021·Granted May 2, 2023·0 cites·11 claims
- 3974US11415519B2Accurate Raman spectroscopyNOVA LTD·Filed 2020·Granted Aug 16, 2022·0 cites·20 claims
- 4073US11692953B2X-ray based measurements in patterned structureNOVA LTD·Filed 2021·Granted Jul 4, 2023·0 cites·20 claims
- 4173US11275027B2Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 4273US11107738B2Layer detection for high aspect ratio etch controlNOVA LTD·Filed 2017·Granted Aug 31, 2021·2 cites·20 claims
- 4370US12152869B2Monitoring system and method for verifying measurements in patterned structuresNOVA LTD·Filed 2021·Granted Nov 26, 2024·0 cites·22 claims
- 4469US11868054B2Optical metrology system and methodNOVA LTD·Filed 2021·Granted Jan 9, 2024·0 cites·15 claims
- 4569US11460415B2Optical phase measurement system and methodNOVA LTD·Filed 2020·Granted Oct 4, 2022·0 cites·18 claims
- 4669US11450541B2Metrology method and systemNOVA LTD·Filed 2018·Granted Sep 20, 2022·1 cites·19 claims
- 4768US2024069445A1Self-supervised representation learning for interpretation of ocd dataNOVA LTD·Filed 2023·Application pending·0 cites
- 4867US11994374B2Integrated measurement systemNOVA LTD·Filed 2019·Granted May 28, 2024·2 cites·21 claims
- 4967US11309162B2TEM-based metrology method and systemNOVA LTD·Filed 2021·Granted Apr 19, 2022·0 cites·5 claims
- 5066US11543294B2Optical technique for material characterizationNOVA LTD·Filed 2019·Granted Jan 3, 2023·0 cites·14 claims
Showing the top 50 of 81 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →