Assignee
NPS CORP
KR·6 granted patents·1 pending application·3 citations·filing 2014–2019
Top patents by PatentIndex Score
7 records- 0174US10480075B2Graphene synthesis chamber and method of synthesizing graphene by using the sameNPS CORP·Filed 2017·Granted Nov 19, 2019·1 cites·7 claims
- 0265US11486035B2Graphene synthesis chamber and method of synthesizing graphene by using the sameNPS CORP·Filed 2019·Granted Nov 1, 2022·0 cites·18 claims
- 0364US10914007B2Method and apparatus for substrate processingNPS CORP·Filed 2018·Granted Feb 9, 2021·1 cites·3 claims
- 0464US2016319431A1Graphene synthesis chamber and method of synthesizing graphene by using the sameNPS CORP·Filed 2016·Application pending·0 cites
- 0553US9892942B2Substrate processing apparatusNPS CORP·Filed 2014·Granted Feb 13, 2018·1 cites·7 claims
- 0636US10950473B2Heat source device and substrate processing apparatus including sameNPS CORP·Filed 2018·Granted Mar 16, 2021·0 cites·17 claims
- 0726US10643868B2Apparatus for processing substrateNPS CORP·Filed 2016·Granted May 5, 2020·0 cites·15 claims
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