Graphene synthesis chamber and method of synthesizing graphene by using the same

Abstract

A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.

What is claimed is: 
     
         1 . A graphene synthesis chamber comprising:
 a chamber case in which a substrate comprising a metal thin film is placed;   a gas supplier which supplies at least one gas comprising a carbon gas into an inner space of the chamber case;   a main heater which emits at least one light to the inner space to heat the substrate; and   at least one auxiliary heater disposed between the substrate and the main heater and configured to heat an auxiliary space between the substrate and the at least one auxiliary heater for synthesizing graphene on the substrate,   wherein the at least one auxiliary heater comprises graphite.   
     
     
         2 . The graphene synthesis chamber of  claim 1 , wherein a temperature of the auxiliary space is about 1000° C. or higher. 
     
     
         3 . The graphene synthesis chamber of  claim 1 , wherein a temperature of the auxiliary space is substantially constant. 
     
     
         4 . The graphene synthesis chamber of  claim 1 , wherein a temperature of the auxiliary space is higher than a temperature of a space between the main heater and the at least one auxiliary heater. 
     
     
         5 . The graphene synthesis chamber of  claim 1 , wherein the at least one auxiliary heater comprises:
 a first auxiliary heating portion which faces a first surface of the substrate; and   a second auxiliary heating portion which faces a second surface, opposite to the first surface, of the substrate.   
     
     
         6 . The graphene synthesis chamber of  claim 5 , wherein the main heater comprises:
 a first main heating portion which faces the first surface of the substrate; and   a second main heating portion which faces the second surface of the substrate.   
     
     
         7 . The graphene synthesis chamber of  claim 6 ,
 wherein the first auxiliary heating portion is between the first main heating portion and the substrate and the second auxiliary heating portion is between the second main heating portion and the substrate.   
     
     
         8 . The graphene synthesis chamber of  claim 1 , wherein the gas supplier supplies the at least one gas into the auxiliary space. 
     
     
         9 . The graphene synthesis chamber of  claim 1 , wherein the main heater comprises:
 a halogen lamp; and   a window surrounding an outer circumference of the halogen lamp.