Assignee
P C T SYSTEMS INC
US·6 granted patents·5 pending applications·154 citations·filing 1989–2007
Top patents by PatentIndex Score
11 records- 0188US7238085B2Method and apparatus to process substrates with megasonic energyP C T SYSTEMS INC·Filed 2004·Granted Jul 3, 2007·41 cites·55 claims
- 0275US5279316AMultiprocessing sonic bath system for semiconductor wafersP C T SYSTEMS INC·Filed 1992·Granted Jan 18, 1994·61 cites·7 claims
- 0374US6595224B2Bath system with sonic transducers on vertical and angled wallsP C T SYSTEMS INC·Filed 2001·Granted Jul 22, 2003·26 cites·21 claims
- 0455US4955402AConstant bath system with weirP C T SYSTEMS INC·Filed 1989·Granted Sep 11, 1990·22 cites·14 claims
- 0553US6959503B2Method and apparatus for removing liquid from substrate surfaces using suctionP C T SYSTEMS INC·Filed 2003·Granted Nov 1, 2005·4 cites·13 claims
- 0651US2007207707A1Method and apparatus to process substrates with megasonic energyP C T SYSTEMS INC·Filed 2007·Application pending·0 cites
- 0751US2007207710A1Method and apparatus to process substrates with megasonic energyP C T SYSTEMS INC·Filed 2007·Application pending·0 cites
- 0851US2007197138A1Method and apparatus to process substrates with megasonic energyP C T SYSTEMS INC·Filed 2007·Application pending·0 cites
- 0947US7415780B2Method and apparatus for removing liquid from substrate surfaces using suctionP C T SYSTEMS INC·Filed 2005·Granted Aug 26, 2008·0 cites·17 claims
- 1033US2004159335A1Method and apparatus for removing organic layersP C T SYSTEMS INC·Filed 2003·Application pending·0 cites
- 1133US2004154641A1Substrate processing apparatus and methodP C T SYSTEMS INC·Filed 2002·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →