Assignee
RUDOLPH TECH INC
US·25 granted patents·3 pending applications·30 citations·filing 2012–2020
Top patents by PatentIndex Score
28 records- 0192US9464992B2Automated wafer defect inspection system and a process of performing such inspectionRUDOLPH TECH INC·Filed 2016·Granted Oct 11, 2016·6 cites·11 claims
- 0287US9664625B2Inspection of substrates using calibration and imagingRUDOLPH TECH INC·Filed 2013·Granted May 30, 2017·6 cites·16 claims
- 0385US9576862B2Optical acoustic substrate assessment system and methodRUDOLPH TECH INC·Filed 2014·Granted Feb 21, 2017·8 cites·9 claims
- 0479US9684052B2Method of measuring and assessing a probe card with an inspection deviceRUDOLPH TECH INC·Filed 2014·Granted Jun 20, 2017·5 cites·22 claims
- 0572US9460953B2Edge grip substrate handlerRUDOLPH TECH INC·Filed 2013·Granted Oct 4, 2016·3 cites·20 claims
- 0660US9772183B2Flying sensor headRUDOLPH TECH INC·Filed 2013·Granted Sep 26, 2017·2 cites·13 claims
- 0756US11578967B2Wafer inspection system including a laser triangulation sensorRUDOLPH TECH INC·Filed 2018·Granted Feb 14, 2023·0 cites·15 claims
- 0855US9658169B2System and method of characterizing micro-fabrication processesRUDOLPH TECH INC·Filed 2014·Granted May 23, 2017·0 cites·11 claims
- 0955US9587932B2System for directly measuring the depth of a high aspect ratio etched feature on a waferRUDOLPH TECH INC·Filed 2016·Granted Mar 7, 2017·0 cites·15 claims
- 1054US10024804B2System and method of characterizing micro-fabrication processesRUDOLPH TECH INC·Filed 2017·Granted Jul 17, 2018·0 cites·12 claims
- 1152US10412311B2Focus adjustment for surface part inspectionRUDOLPH TECH INC·Filed 2016·Granted Sep 10, 2019·0 cites·20 claims
- 1251US10664714B2Substrate handling and identification mechanismRUDOLPH TECH INC·Filed 2017·Granted May 26, 2020·0 cites·12 claims
- 1351US9535089B2Inspection device with vertically moveable assemblyRUDOLPH TECH INC·Filed 2014·Granted Jan 3, 2017·0 cites·18 claims
- 1450US2017276758A1Method of measuring and assessing a probe card with an inspection deviceRUDOLPH TECH INC·Filed 2017·Application pending·0 cites
- 1548US9437467B2Substrate handlerRUDOLPH TECH INC·Filed 2014·Granted Sep 6, 2016·0 cites·20 claims
- 1646US10553504B2Inspection of substratesRUDOLPH TECH INC·Filed 2018·Granted Feb 4, 2020·0 cites·17 claims
- 1746US9638782B2Probe card analysis system and methodRUDOLPH TECH INC·Filed 2013·Granted May 2, 2017·0 cites·12 claims
- 1846US9431282B2Wafer inversion mechanismRUDOLPH TECH INC·Filed 2012·Granted Aug 30, 2016·0 cites·17 claims
- 1943US10014228B2Method and apparatus to assist the processing of deformed substratesRUDOLPH TECH INC·Filed 2015·Granted Jul 3, 2018·0 cites·18 claims
- 2043US9952041B2Assessing alignment of top and bottom ends of TSVs and characterizing microfabrication processRUDOLPH TECH INC·Filed 2014·Granted Apr 24, 2018·0 cites·9 claims
- 2142US10466179B2Semiconductor device inspection of metallic discontinuitiesRUDOLPH TECH INC·Filed 2018·Granted Nov 5, 2019·0 cites·12 claims
- 2241US11315832B2Wafer singulation process controlRUDOLPH TECH INC·Filed 2016·Granted Apr 26, 2022·0 cites·18 claims
- 2340US9625832B2Planar motor system with increased efficiencyRUDOLPH TECH INC·Filed 2013·Granted Apr 18, 2017·0 cites·12 claims
- 2435US10173249B2Calibration of semiconductor metrology systemsRUDOLPH TECH INC·Filed 2015·Granted Jan 8, 2019·0 cites·11 claims
- 2531US10209300B2Opto-acoustic metrology of signal attenuating structuresRUDOLPH TECH INC·Filed 2016·Granted Feb 19, 2019·0 cites·16 claims
- 2631US9594230B2On-axis focus sensor and methodRUDOLPH TECH INC·Filed 2012·Granted Mar 14, 2017·0 cites·11 claims
- 2730US2017045463A1Volumetric substrate scannerRUDOLPH TECH INC·Filed 2015·Application pending·0 cites
- 2828US2020225278A1Wafer crack detectionRUDOLPH TECH INC·Filed 2020·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →