US2017276758A1PendingUtilityA1

Method of measuring and assessing a probe card with an inspection device

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Assignee: RUDOLPH TECH INCPriority: Apr 23, 2010Filed: Jun 14, 2017Published: Sep 28, 2017
Est. expiryApr 23, 2030(~3.8 yrs left)· nominal 20-yr term from priority
Inventors:Greg Olmstead
G01R 31/2891G01R 35/00
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Claims

Abstract

A method of assessing functionality of a probe card includes providing a probe card analyzer without a probe card interface, removably coupling a probe card having probes to a support plate of the probe card analyzer, aligning a sensor head of the probe card analyzer with the probe card, and measuring a component of the probes with the sensor head.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A method of assessing functionality of a probe card, comprising:
 providing a probe card analyzer without a probe card interface;   removably coupling a probe card having probes to a support plate of the probe card analyzer;   aligning a sensor head of the probe card analyzer with the probe card; and   measuring a characteristic of a component with the sensor head.

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