Assignee
SAKAI MASANORI
JP·8 granted patents·3 pending applications·27 citations·filing 2009–2011
Top patents by PatentIndex Score
11 records- 0195US8461062B2Substrate processing apparatus and method for manufacturing semiconductor deviceSAKAI MASANORI·Filed 2011·Granted Jun 11, 2013·10 cites·8 claims
- 0292US8828141B2Substrate processing apparatus and method for manufacturing semiconductor deviceSAKAI MASANORI·Filed 2009·Granted Sep 9, 2014·11 cites·21 claims
- 0383US9169553B2Semiconductor device producing methodSAKAI MASANORI·Filed 2011·Granted Oct 27, 2015·2 cites·3 claims
- 0479US9238257B2Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatusSAKAI MASANORI·Filed 2010·Granted Jan 19, 2016·4 cites·17 claims
- 0560US2011271753A1Substrate processing apparatus and method of confirming operation of liquid flowrate control deviceSAKAI MASANORI·Filed 2011·Application pending·0 cites
- 0657US2009186467A1Substrate Processing Apparatus and Producing Method of Semiconductor DeviceSAKAI MASANORI·Filed 2009·Application pending·0 cites
- 0752US8598047B2Substrate processing apparatus and producing method of semiconductor deviceSAKAI MASANORI·Filed 2011·Granted Dec 3, 2013·0 cites·9 claims
- 0851US8901011B2Substrate processing apparatus and semiconductor device producing methodSAKAI MASANORI·Filed 2011·Granted Dec 2, 2014·0 cites·11 claims
- 0947US2011290182A1Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatusSAKAI MASANORI·Filed 2011·Application pending·0 cites
- 1042US8614147B2Method of manufacturing a semiconductor deviceSAKAI MASANORI·Filed 2010·Granted Dec 24, 2013·0 cites·12 claims
- 1138US8257093B2Electronic apparatusSAKAI MASANORI·Filed 2011·Granted Sep 4, 2012·0 cites·10 claims
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