Assignee
SCHEUERER ROLAND
DE·4 granted patents·3 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0157US8181522B2Capacitive acceleration sensor having a movable mass and a spring elementSCHEUERER ROLAND·Filed 2008·Granted May 22, 2012·3 cites·12 claims
- 0249US8138006B2Method for producing a micromechanical component having a trench structure for backside contactSCHEUERER ROLAND·Filed 2008·Granted Mar 20, 2012·0 cites·5 claims
- 0347US8419957B2Method for producing a micromechanical component having a filler layer and a masking layerSCHEUERER ROLAND·Filed 2008·Granted Apr 16, 2013·0 cites·18 claims
- 0446US8564078B2Method for producing a micromechanical component having a trench structure for backside contactSCHEUERER ROLAND·Filed 2011·Granted Oct 22, 2013·0 cites·8 claims
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