Assignee
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD
JP·13 granted patents·5 pending applications·9 citations·filing 2014–2024
Top patents by PatentIndex Score
18 records- 0186US12217986B2Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substratesSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2021·Granted Feb 4, 2025·1 cites·7 claims
- 0285US2025140584A1Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substratesSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2024·Application pending·0 cites
- 0382US2023042033A1Substrate treating apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2022·Application pending·0 cites
- 0478US9687874B2Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating unitsSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2015·Granted Jun 27, 2017·2 cites·4 claims
- 0577US10290521B2Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipeSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2015·Granted May 14, 2019·1 cites·12 claims
- 0677US9703199B2Substrate processing apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2014·Granted Jul 11, 2017·3 cites·5 claims
- 0775US10047441B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2017·Granted Aug 14, 2018·1 cites·7 claims
- 0867US2019221457A1Substrate treating apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2019·Application pending·0 cites
- 0959US9581907B2Developing apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2014·Granted Feb 28, 2017·0 cites·10 claims
- 1059US9477162B2Substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2014·Granted Oct 25, 2016·0 cites·8 claims
- 1157US9828676B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Granted Nov 28, 2017·0 cites·20 claims
- 1255US11004706B2Substrate treating apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2018·Granted May 11, 2021·0 cites·16 claims
- 1354US2016163573A1Substrate treating apparatus with parallel substrate treatment linesSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Application pending·0 cites
- 1453US10181417B2Substrate treating apparatus and substrate transporting methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2015·Granted Jan 15, 2019·1 cites·18 claims
- 1550US10960426B2Development processing deviceSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2018·Granted Mar 30, 2021·0 cites·10 claims
- 1650US10201824B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Granted Feb 12, 2019·0 cites·7 claims
- 1750US2016203997A1Substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Application pending·0 cites
- 1845US10216099B2Substrate processing apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Granted Feb 26, 2019·0 cites·5 claims
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