Assignee
SEMICONDUCTOR PROCESS LAB CO
JP·19 granted patents·1 pending application·762 citations·filing 1990–2006
Top patents by PatentIndex Score
20 records- 0196US6514884B2Method for reforming base surface, method for manufacturing semiconductor device and equipment for manufacturing the sameSEMICONDUCTOR PROCESS LAB CO·Filed 1998·Granted Feb 4, 2003·220 cites·10 claims
- 0286US5858100ASubstrate holder and reaction apparatusSEMICONDUCTOR PROCESS LAB CO·Filed 1995·Granted Jan 12, 1999·82 cites·16 claims
- 0385US5302209AApparatus for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1992·Granted Apr 12, 1994·97 cites·8 claims
- 0483US5769942AMethod for epitaxial growthSEMICONDUCTOR PROCESS LAB CO·Filed 1995·Granted Jun 23, 1998·39 cites·14 claims
- 0582US6110290AMethod for epitaxial growth and apparatus for epitaxial growthSEMICONDUCTOR PROCESS LAB CO·Filed 1998·Granted Aug 29, 2000·35 cites·5 claims
- 0671US6133160AMethod for reforming undercoating surface and method for production of semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1998·Granted Oct 17, 2000·40 cites·20 claims
- 0770US5051380AProcess for producing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1990·Granted Sep 24, 1991·45 cites·2 claims
- 0869US5376591AMethod for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1992·Granted Dec 27, 1994·44 cites·18 claims
- 0969US5281295ASemiconductor fabrication equipmentSEMICONDUCTOR PROCESS LAB CO·Filed 1992·Granted Jan 25, 1994·47 cites·5 claims
- 1060US5679165AApparatus for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1995·Granted Oct 21, 1997·26 cites·8 claims
- 1159US5231058AProcess for forming cvd film and semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1990·Granted Jul 27, 1993·30 cites·2 claims
- 1258US6900144B2Film-forming surface reforming method and semiconductor device manufacturing methodSEMICONDUCTOR PROCESS LAB CO·Filed 2001·Granted May 31, 2005·6 cites·14 claims
- 1357US6352943B2Method of film formation and method for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1998·Granted Mar 5, 2002·21 cites·22 claims
- 1454US7238629B2Deposition method, method of manufacturing semiconductor device, and semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 2004·Granted Jul 3, 2007·4 cites·11 claims
- 1554US6911405B2Semiconductor device and method of manufacturing the sameSEMICONDUCTOR PROCESS LAB CO·Filed 2001·Granted Jun 28, 2005·4 cites·18 claims
- 1651US7132171B2Low dielectric constant insulating film and method of forming the sameSEMICONDUCTOR PROCESS LAB CO·Filed 2004·Granted Nov 7, 2006·5 cites·13 claims
- 1744US7329612B2Semiconductor device and process for producing the sameSEMICONDUCTOR PROCESS LAB CO·Filed 2003·Granted Feb 12, 2008·0 cites·17 claims
- 1842US5569499AMethod for reforming insulating filmSEMICONDUCTOR PROCESS LAB CO·Filed 1994·Granted Oct 29, 1996·11 cites·10 claims
- 1942US2006251825A1Low dielectric constant insulating film and method of forming the sameSEMICONDUCTOR PROCESS LAB CO·Filed 2006·Application pending·0 cites
- 2032US6207537B1Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layerSEMICONDUCTOR PROCESS LAB CO·Filed 1999·Granted Mar 27, 2001·6 cites·7 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →