Individual holder
SORENSEN CARL A
US·4 granted patents·1 pending application·160 citations·filing 2008–2011
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0198US8992723B2RF bus and RF return bus for plasma chamber electrodeSORENSEN CARL A·Filed 2010·Granted Mar 31, 2015·157 cites·7 claims
- 0268US8691047B2Large area plasma processing chamber with at-electrode RF matchingSORENSEN CARL A·Filed 2010·Granted Apr 8, 2014·2 cites·5 claims
- 0366US8163191B2Apparatus and methods for using high frequency chokes in a substrate deposition apparatusSORENSEN CARL A·Filed 2011·Granted Apr 24, 2012·1 cites·20 claims
- 0454US8075734B2Remote inductively coupled plasma source for CVD chamber cleaningSORENSEN CARL A·Filed 2008·Granted Dec 13, 2011·0 cites·5 claims
- 0539US2008276868A1Rigid rf transmission line with easy removal sectionSORENSEN CARL A·Filed 2008·Application pending·0 cites
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