Assignee
SPEEDFAM CO LTD
JP·52 granted patents·8 pending applications·1,395 citations·filing 1986–2019
Top patents by PatentIndex Score
60 records- 0195US7147541B2Thickness control method and double side polisherSPEEDFAM CO LTD·Filed 2006·Granted Dec 12, 2006·49 cites·6 claims
- 0294US5099614AFlat lapping machine with sizing mechanismSPEEDFAM CO LTD·Filed 1987·Granted Mar 31, 1992·97 cites·5 claims
- 0391US5097630ASpecular machining apparatus for peripheral edge portion of waferSPEEDFAM CO LTD·Filed 1988·Granted Mar 24, 1992·55 cites·14 claims
- 0487US4805348AFlat lapping machineSPEEDFAM CO LTD·Filed 1986·Granted Feb 21, 1989·50 cites·16 claims
- 0586US6432824B2Method for manufacturing a semiconductor waferSPEEDFAM CO LTD·Filed 2001·Granted Aug 13, 2002·39 cites·5 claims
- 0685US7137867B2Thickness control method and double side polisherSPEEDFAM CO LTD·Filed 2006·Granted Nov 21, 2006·15 cites·2 claims
- 0784US6012964ACarrier and CMP apparatusSPEEDFAM CO LTD·Filed 1998·Granted Jan 11, 2000·73 cites·56 claims
- 0883US5980769APlasma etching methodSPEEDFAM CO LTD·Filed 1997·Granted Nov 9, 1999·35 cites·4 claims
- 0983US5916009AApparatus for applying an urging force to a waferSPEEDFAM CO LTD·Filed 1997·Granted Jun 29, 1999·70 cites·17 claims
- 1082US6773335B2Apparatus for polishing periphery of device wafer and polishing methodSPEEDFAM CO LTD·Filed 2002·Granted Aug 10, 2004·29 cites·11 claims
- 1180US6110026ACarrier and polishing apparatusSPEEDFAM CO LTD·Filed 1999·Granted Aug 29, 2000·58 cites·10 claims
- 1279US6273803B1Carriers and polishing apparatusSPEEDFAM CO LTD·Filed 1999·Granted Aug 14, 2001·57 cites·14 claims
- 1377US6074277APolishing apparatusSPEEDFAM CO LTD·Filed 1999·Granted Jun 13, 2000·49 cites·5 claims
- 1476US6126531ASlurry recycling system of CMP apparatus and method of sameSPEEDFAM CO LTD·Filed 1999·Granted Oct 3, 2000·47 cites·8 claims
- 1574US6040244APolishing pad control method and apparatusSPEEDFAM CO LTD·Filed 1997·Granted Mar 21, 2000·48 cites·17 claims
- 1674US6030488AChemical and mechanical polishing apparatusSPEEDFAM CO LTD·Filed 1998·Granted Feb 29, 2000·38 cites·12 claims
- 1772US6062949APolishing amount control system and method for sameSPEEDFAM CO LTD·Filed 1998·Granted May 16, 2000·46 cites·10 claims
- 1872US6062954ASemiconductor wafer surface flattening apparatusSPEEDFAM CO LTD·Filed 1998·Granted May 16, 2000·44 cites·17 claims
- 1972US5969521AAutomatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined spaceSPEEDFAM CO LTD·Filed 1997·Granted Oct 19, 1999·48 cites·7 claims
- 2069US6422930B2Apparatus for removing deposited filmSPEEDFAM CO LTD·Filed 2001·Granted Jul 23, 2002·13 cites·4 claims
- 2169US6041465ACleaning apparatusSPEEDFAM CO LTD·Filed 1998·Granted Mar 28, 2000·37 cites·9 claims
- 2268US6093087AWafer processing machine and a processing method therebySPEEDFAM CO LTD·Filed 1999·Granted Jul 25, 2000·35 cites·5 claims
- 2367US6840841B2Wafer edge polishing systemSPEEDFAM CO LTD·Filed 2003·Granted Jan 11, 2005·11 cites·3 claims
- 2467US6316369B1Corrosion-resistant system and method for a plasma etching apparatusSPEEDFAM CO LTD·Filed 2000·Granted Nov 13, 2001·6 cites·11 claims
- 2565US6875701B2Nanotopography removing methodSPEEDFAM CO LTD·Filed 2002·Granted Apr 5, 2005·11 cites·4 claims
- 2664US6312487B1Polishing compound and an edge polishing method therebySPEEDFAM CO LTD·Filed 1999·Granted Nov 6, 2001·28 cites·15 claims
- 2763US6649528B2Local dry etching methodSPEEDFAM CO LTD·Filed 2002·Granted Nov 18, 2003·10 cites·2 claims
- 2863US6261160B1Method and apparatus for specular-polishing of work edgesSPEEDFAM CO LTD·Filed 1998·Granted Jul 17, 2001·24 cites·7 claims
- 2962US6478660B2Apparatus of and method for polishing the outer circumferential portions of a circular plate-shaped workSPEEDFAM CO LTD·Filed 2001·Granted Nov 12, 2002·9 cites·9 claims
- 3062US6159388APlasma etching method and plasma etching system for carrying out the sameSPEEDFAM CO LTD·Filed 1998·Granted Dec 12, 2000·26 cites·15 claims
- 3162US6066230APlanarization method, workpiece measuring method, and surface planarization apparatus having a measuring deviceSPEEDFAM CO LTD·Filed 1998·Granted May 23, 2000·23 cites·5 claims
- 3260US5800253ADisc streak pattern forming method and apparatusSPEEDFAM CO LTD·Filed 1997·Granted Sep 1, 1998·16 cites·12 claims
- 3360US2009203300A1Carrier for holding an object to be polishedSPEEDFAM CO LTD·Filed 2009·Application pending·0 cites
- 3455US6300249B1Polishing compound and a method for polishingSPEEDFAM CO LTD·Filed 1999·Granted Oct 9, 2001·20 cites·3 claims
- 3554US6908566B2Local dry etching methodSPEEDFAM CO LTD·Filed 2003·Granted Jun 21, 2005·5 cites·5 claims
- 3654US6210260B1Carrier and CMP apparatusSPEEDFAM CO LTD·Filed 1999·Granted Apr 3, 2001·19 cites·5 claims
- 3753US6152813ADresser and dressing apparatusSPEEDFAM CO LTD·Filed 1998·Granted Nov 28, 2000·19 cites·6 claims
- 3853US6068545AWorkpiece surface processing apparatusSPEEDFAM CO LTD·Filed 1999·Granted May 30, 2000·18 cites·5 claims
- 3952US7094355B2Local dry etching methodSPEEDFAM CO LTD·Filed 2003·Granted Aug 22, 2006·4 cites·6 claims
- 4052US6250995B1Apparatus for polishing outer periphery of workpieceSPEEDFAM CO LTD·Filed 1999·Granted Jun 26, 2001·15 cites·20 claims
- 4151US6126530ACleaning device for surface plate correcting dresserSPEEDFAM CO LTD·Filed 1999·Granted Oct 3, 2000·18 cites·10 claims
- 4248US5810028AWashing apparatus for disc-like workpiecesSPEEDFAM CO LTD·Filed 1997·Granted Sep 22, 1998·18 cites·5 claims
- 4345US6012193AApparatus for washing disc-shaped workpiecesSPEEDFAM CO LTD·Filed 1998·Granted Jan 11, 2000·12 cites·15 claims
- 4444US2008237535A1Composition for polishing semiconductor wafer, and method of producing the sameSPEEDFAM CO LTD·Filed 2008·Application pending·0 cites
- 4543US6429399B2Discharge tube for a local etching apparatus and a local etching apparatus using the discharge tubeSPEEDFAM CO LTD·Filed 2001·Granted Aug 6, 2002·1 cites·7 claims
- 4641US6254718B1Combined CMP and plasma etching wafer flattening systemSPEEDFAM CO LTD·Filed 1999·Granted Jul 3, 2001·9 cites·3 claims
- 4740US5690542ADisc streak pattern forming method and apparatusSPEEDFAM CO LTD·Filed 1996·Granted Nov 25, 1997·10 cites·8 claims
- 4839US6039638AWork planarizing method and apparatusSPEEDFAM CO LTD·Filed 1998·Granted Mar 21, 2000·11 cites·16 claims
- 4939US5885140ASingle-side abrasion apparatus with dresserSPEEDFAM CO LTD·Filed 1997·Granted Mar 23, 1999·8 cites·5 claims
- 5039US2001007275A1Wafer flattening process and systemSPEEDFAM CO LTD·Filed 2001·Application pending·0 cites
Showing the top 50 of 60 patent records by PatentIndex Score.
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