Carrier for holding an object to be polished

Abstract

The present invention provides a diamond-like carbon coated carrier for holding an object to be polished used for double-sided polishing, and a manufacturing method therefor. The carrier for holding a workpiece according to the present invention has a substrate whose entire surface is coated with diamond-like carbon. The method of the present invention includes coating the entire carrier surface with diamond-like carbon using a surface coating apparatus using plasma CVD.

1 . A carrier for holding an object to be polished, used for a double-sided polishing apparatus, comprising a substrate which has been subjected to lapping and/or polishing to provide the substrate with a uniform thickness and then coating the entire surface of the substrate with diamond-like carbon. 
   
   
       2 . The carrier for holding an object to be polished used for a double-sided polishing apparatus of  claim 1 , wherein the relative standard deviation of the substrate thickness is no more than 0.4%. 
   
   
       3 . The carrier for holding an object to be polished used for a double-sided polishing apparatus of  claim 1 , wherein the diamond-like carbon is formed into a film having a thickness of from 0.10 μm to 20 μm. 
   
   
       4 . The carrier for holding an object to be polished used for a double-sided polishing apparatus of  claim 1 , wherein the substrate is made of a material selected from the group consisting of stainless steel, steel, aluminum, an aluminum alloy, a resin, a fiber-reinforced resin, and a composite thereof. 
   
   
       5 . The carrier for holding an object to be polished used for a double-sided polishing apparatus of  claim 1 , wherein the carrier has a holding hole for holding the object and resinous portion surrounding the holding hole.