Assignee
STEAG HAMATECH AG
US·18 granted patents·183 citations·filing 1996–2005
Top patents by PatentIndex Score
18 records- 0183US6512207B1Apparatus and method for the treatment of substratesSTEAG HAMATECH AG·Filed 2000·Granted Jan 28, 2003·40 cites·19 claims
- 0278US6402903B1Magnetic array for sputtering systemSTEAG HAMATECH AG·Filed 2000·Granted Jun 11, 2002·18 cites·33 claims
- 0375US6460730B1Method and device for dispensing a fluid from a pressure tankSTEAG HAMATECH AG·Filed 2000·Granted Oct 8, 2002·38 cites·16 claims
- 0471US7842905B2Method and device for the thermal treatment of substratesSTEAG HAMATECH AG·Filed 2005·Granted Nov 30, 2010·5 cites·30 claims
- 0569US6919538B2Method for thermally treating substratesSTEAG HAMATECH AG·Filed 2001·Granted Jul 19, 2005·15 cites·15 claims
- 0664US6406598B2System and method for transporting and sputter coating a substrate in a sputter deposition systemSTEAG HAMATECH AG·Filed 2001·Granted Jun 18, 2002·6 cites·22 claims
- 0759US6695017B1Method and apparatus for filling a pressure tank with a fluidSTEAG HAMATECH AG·Filed 2000·Granted Feb 24, 2004·17 cites·13 claims
- 0856US6413381B1Horizontal sputtering systemSTEAG HAMATECH AG·Filed 2000·Granted Jul 2, 2002·3 cites·52 claims
- 0955US6953514B2Method and device for assembling substratesSTEAG HAMATECH AG·Filed 2001·Granted Oct 11, 2005·4 cites·7 claims
- 1052US7008502B2Method and apparatus for joining substratesSTEAG HAMATECH AG·Filed 2001·Granted Mar 7, 2006·2 cites·9 claims
- 1150US6170169B1Device for drying substratesSTEAG HAMATECH AG·Filed 1998·Granted Jan 9, 2001·11 cites·17 claims
- 1244US6814125B1Apparatus for joining substrates togetherSTEAG HAMATECH AG·Filed 2000·Granted Nov 9, 2004·1 cites·23 claims
- 1338US7182116B2Device for joining substratesSTEAG HAMATECH AG·Filed 2002·Granted Feb 27, 2007·0 cites·10 claims
- 1437US6241079B1Device for conveying substrates through a substrate processing plantSTEAG HAMATECH AG·Filed 1998·Granted Jun 5, 2001·11 cites·11 claims
- 1533US6074482ADevice for coating disc-shaped information storage mediaSTEAG HAMATECH AG·Filed 1996·Granted Jun 13, 2000·6 cites·11 claims
- 1628US6494511B1Apparatus and method for handling substratesSTEAG HAMATECH AG·Filed 1999·Granted Dec 17, 2002·2 cites·14 claims
- 1727US6612558B1Apparatus for fixing substratesSTEAG HAMATECH AG·Filed 1999·Granted Sep 2, 2003·2 cites·20 claims
- 1815US6368691B1Substrates disk for digital videoSTEAG HAMATECH AG·Filed 1999·Granted Apr 9, 2002·2 cites·10 claims
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