Assignee
TES CO LTD
KR·19 granted patents·45 pending applications·0 citations·filing 2007–2025
Top patents by PatentIndex Score
64 records- 0169US12233501B2Substrate support deviceTES CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·16 claims
- 0269US2025218733A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 0368US2026075683A1Susceptor assembly and substrate processing apparatusTES CO LTD·Filed 2025·Application pending·0 cites
- 0467US12500102B2Substrate processing apparatus and substrate monitoring methodTES CO LTD·Filed 2023·Granted Dec 16, 2025·0 cites·8 claims
- 0567US12488982B2Method of processing substrateTES CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·7 claims
- 0667US12438020B2Substrate processing apparatusTES CO LTD·Filed 2024·Granted Oct 7, 2025·0 cites·14 claims
- 0767US2024309504A1Substrate processing apparatus and gas supply method thereofTES CO LTD·Filed 2024·Application pending·0 cites
- 0864US2025183075A1Substrate monitoring method and substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 0963US12488993B2Substrate processing methodTES CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·14 claims
- 1063US2025218789A1Substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1163US2025167038A1Substrate processing apparatus and detecting method of tray tiltingTES CO LTD·Filed 2024·Application pending·0 cites
- 1263US2025218785A1Substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1362US2025215556A1Method for forming hydrogen-containing carbon film using pecvdTES CO LTD·Filed 2024·Application pending·0 cites
- 1461US12480211B2Oxygen-doped amorphous carbon film and method for depositing the sameTES CO LTD·Filed 2024·Granted Nov 25, 2025·0 cites·9 claims
- 1561US2024410650A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1661US2025198001A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 1761US2025161996A1Substrate processing apparatus and chamber cleaning methodTES CO LTD·Filed 2024·Application pending·0 cites
- 1861US2025391637A1Substrate processing methodTES CO LTD·Filed 2025·Application pending·0 cites
- 1960US2025079193A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 2059US12444578B2Method for protecting apparatus from etching substances and method for forming oxide filmTES CO LTD·Filed 2021·Granted Oct 14, 2025·0 cites·9 claims
- 2159US2025198003A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2259US2023314966A1Mask processing method and apparatusTES CO LTD·Filed 2023·Application pending·0 cites
- 2359US2024167159A1Metal organic chemical vapor deposition deviceTES CO LTD·Filed 2022·Application pending·0 cites
- 2459US2025198000A1Substrate processing apparatusTES CO LTD·Filed 2024·Application pending·0 cites
- 2559US2025051919A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2659US2025001467A1Substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2759US2024175135A1Metal organic chemical vapor deposition apparatusTES CO LTD·Filed 2022·Application pending·0 cites
- 2858US2024370041A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2024·Application pending·0 cites
- 2957US11118266B2Method for depositing protection film of light-emitting elementTES CO LTD·Filed 2018·Granted Sep 14, 2021·0 cites·15 claims
- 3057US2023376055A1Substrate supporting unit and temperature control method thereofTES CO LTD·Filed 2023·Application pending·0 cites
- 3157US2024178023A1Process detecting unit, substrate processing apparatus and substrate process monitoring methodTES CO LTD·Filed 2023·Application pending·0 cites
- 3256US2023204256A1Integrated gas system for substrate processing apparatusTES CO LTD·Filed 2022·Application pending·0 cites
- 3356US2023392262A1Substrate processing apparatus and substrate processing methodTES CO LTD·Filed 2023·Application pending·0 cites
- 3455US10164238B2Method for manufacturing battery protection device and battery protection deviceTES CO LTD·Filed 2014·Granted Dec 25, 2018·0 cites·12 claims
- 3554US2025218773A1Amorphous carbon film and deposition method thereofTES CO LTD·Filed 2024·Application pending·0 cites
- 3653US12512328B2Method of processing substrateTES CO LTD·Filed 2022·Granted Dec 30, 2025·0 cites·20 claims
- 3753US9209064B2Apparatus for transferring substratesTES CO LTD·Filed 2014·Granted Dec 8, 2015·0 cites·12 claims
- 3853US9209063B2Apparatus for transferring substratesTES CO LTD·Filed 2014·Granted Dec 8, 2015·0 cites·4 claims
- 3953US2024347335A1Method for depositing amorphous carbon filmTES CO LTD·Filed 2024·Application pending·0 cites
- 4053US2025293036A1Substrate processing methodTES CO LTD·Filed 2025·Application pending·0 cites
- 4152US12308243B2Method of processing substrate having silicon nitride layerTES CO LTD·Filed 2022·Granted May 20, 2025·0 cites·14 claims
- 4252US2025122611A1Method for processing substrateTES CO LTD·Filed 2024·Application pending·0 cites
- 4352US2008277064A1Plasma processing apparatusTES CO LTD·Filed 2008·Application pending·0 cites
- 4451US12308214B2Method of processing substrateTES CO LTD·Filed 2022·Granted May 20, 2025·0 cites·15 claims
- 4551US9142442B2Apparatus for transferring substratesTES CO LTD·Filed 2013·Granted Sep 22, 2015·0 cites·13 claims
- 4651US2008202689A1Plasma processing apparatusTES CO LTD·Filed 2008·Application pending·0 cites
- 4751US2024213051A1Insulator ring assembly and substrate processing apparatusTES CO LTD·Filed 2023·Application pending·0 cites
- 4850US2019186001A1Thin Film Deposition ApparatusTES CO LTD·Filed 2018·Application pending·0 cites
- 4948US2017342558A1Deposition Method of Metallic Carbon FilmTES CO LTD·Filed 2017·Application pending·0 cites
- 5047US2024042463A1Showerhead assembly and substrate processing apparatusTES CO LTD·Filed 2023·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →