Assignee
TOKYO ELECTRON LIMTED
JP·5 granted patents·3 pending applications·131 citations·filing 2000–2013
Top patents by PatentIndex Score
8 records- 0192USD592676SComputer generated image for a display panel or screenTOKYO ELECTRON LIMTED·Filed 2007·Granted May 19, 2009·55 cites·1 claims
- 0290US6482266B1Metal organic chemical vapor deposition method and apparatusTOKYO ELECTRON LIMTED·Filed 2000·Granted Nov 19, 2002·43 cites·20 claims
- 0381US6777968B1Probing method and probing apparatus in which steady load is applied to main chuckTOKYO ELECTRON LIMTED·Filed 2000·Granted Aug 17, 2004·28 cites·11 claims
- 0468US8030632B2Controlling angle of incidence of multiple-beam optical metrology toolsTOKYO ELECTRON LIMTED·Filed 2009·Granted Oct 4, 2011·5 cites·20 claims
- 0552US10056223B2Plasma processing apparatus and temperature control methodTOKYO ELECTRON LIMTED·Filed 2013·Granted Aug 21, 2018·0 cites·6 claims
- 0649US2011217796A1Etching method and apparatusTOKYO ELECTRON LIMTED·Filed 2011·Application pending·0 cites
- 0741US2013206460A1Circuit board for semiconductor device inspection apparatus and manufacturing method thereofTOKYO ELECTRON LIMTED·Filed 2013·Application pending·0 cites
- 0837US2010200162A1Substrate processing system and substrate processing methodTOKYO ELECTRON LIMTED·Filed 2010·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →