Assignee
TOKYO ELECTRON YAMANASHI LTD
JP·3 granted patents·1,318 citations·filing 1993–1998
Top patents by PatentIndex Score
3 records- 0198US6162323APlasma processing apparatusTOKYO ELECTRON YAMANASHI LTD·Filed 1998·Granted Dec 19, 2000·753 cites·20 claims
- 0298USD363464SElectrode for a semiconductor processing apparatusTOKYO ELECTRON YAMANASHI LTD·Filed 1993·Granted Oct 24, 1995·499 cites·1 claims
- 0389US6149760APlasma processing apparatusTOKYO ELECTRON YAMANASHI LTD·Filed 1998·Granted Nov 21, 2000·66 cites·14 claims
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