USD363464SExpiredUtility

Electrode for a semiconductor processing apparatus

98
Assignee: TOKYO ELECTRON YAMANASHI LTDPriority: Aug 27, 1992Filed: Feb 26, 1993Granted: Oct 24, 1995
Est. expiryAug 27, 2012(expired)· nominal 20-yr term from priority
Inventors:Kazuo Fukasawa
98
PatentIndex Score
499
Cited by
0
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for an electrode for a semiconductor processing apparatus, as shown and described.

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