Assignee
TZU GWO-CHUAN
US·3 granted patents·1 pending application·22 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0191US9490150B2Substrate support for substrate backside contamination controlTZU GWO-CHUAN·Filed 2012·Granted Nov 8, 2016·17 cites·18 claims
- 0285US8920564B2Methods and apparatus for thermal based substrate processing with variable temperature capabilityTZU GWO-CHUAN·Filed 2011·Granted Dec 30, 2014·4 cites·12 claims
- 0375US9783889B2Apparatus for variable substrate temperature controlTZU GWO-CHUAN·Filed 2012·Granted Oct 10, 2017·1 cites·20 claims
- 0451US2011114020A1Lid assembly for a processing system to facilitate sequential deposition techniquesTZU GWO-CHUAN·Filed 2011·Application pending·0 cites
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