Assignee
USUI TATEHITO
JP·4 granted patents·3 pending applications·13 citations·filing 2005–2011
Top patents by PatentIndex Score
7 records- 0182US8747608B2Plasma processing apparatusUSUI TATEHITO·Filed 2011·Granted Jun 10, 2014·6 cites·7 claims
- 0279US8088247B2Plasma processing apparatusUSUI TATEHITO·Filed 2006·Granted Jan 3, 2012·5 cites·2 claims
- 0365US8083888B2Plasma processing apparatusUSUI TATEHITO·Filed 2008·Granted Dec 27, 2011·2 cites·2 claims
- 0454US8071397B2Semiconductor fabricating apparatus with function of determining etching processing stateUSUI TATEHITO·Filed 2007·Granted Dec 6, 2011·0 cites·7 claims
- 0550US2006073619A1Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating processUSUI TATEHITO·Filed 2005·Application pending·0 cites
- 0650US2007178610A1Semiconductor Production ApparatusUSUI TATEHITO·Filed 2007·Application pending·0 cites
- 0749US2006000800A1Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring unitsUSUI TATEHITO·Filed 2005·Application pending·0 cites
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