Assignee
WAFERTECH LLC
US·34 granted patents·5 pending applications·74 citations·filing 1998–2018
Top patents by PatentIndex Score
39 records- 0190US7489982B2Method and software for conducting efficient lithography WPH / lost time analysis in semiconductor manufacturingWAFERTECH LLC·Filed 2006·Granted Feb 10, 2009·13 cites·20 claims
- 0278US9275918B2Statistical method for monitoring manufacturing equipment and processing operationsWAFERTECH LLC·Filed 2015·Granted Mar 1, 2016·3 cites·15 claims
- 0377US8743585B2Semiconductor device with one-time programmable memory cell including anti-fuse with metal/polycide gateWAFERTECH LLC·Filed 2013·Granted Jun 3, 2014·5 cites·20 claims
- 0476US7631286B2Automated metrology recipe generationWAFERTECH LLC·Filed 2005·Granted Dec 8, 2009·6 cites·32 claims
- 0574US9480938B2Method for using acoustic waves for purging filters in semiconductor manufacturing equipmentWAFERTECH LLC·Filed 2014·Granted Nov 1, 2016·2 cites·20 claims
- 0671US9397227B2Split gate flash cell semiconductor deviceWAFERTECH LLC·Filed 2016·Granted Jul 19, 2016·1 cites·20 claims
- 0769US7659965B2High throughput wafer stage design for optical lithography exposure apparatusWAFERTECH LLC·Filed 2006·Granted Feb 9, 2010·2 cites·18 claims
- 0866US10056276B2Fluid monitoring system and method for semiconductor fabrication toolsWAFERTECH LLC·Filed 2015·Granted Aug 21, 2018·2 cites·20 claims
- 0964US2015082580A1Turbine powered cleaning apparatusWAFERTECH LLC·Filed 2014·Application pending·0 cites
- 1062US10128325B2Inductor structures for integrated circuitsWAFERTECH LLC·Filed 2015·Granted Nov 13, 2018·2 cites·19 claims
- 1162US9064788B1Statistical method for monitoring manufacturing equipment and processing operationsWAFERTECH LLC·Filed 2014·Granted Jun 23, 2015·1 cites·15 claims
- 1262US8841676B2Vertical integrated semiconductor device with multiple continuous single crystal silicon layers vertically separated from one anotherWAFERTECH LLC·Filed 2013·Granted Sep 23, 2014·1 cites·19 claims
- 1362US7572342B2Method and apparatus for cleaning semiconductor photolithography toolsWAFERTECH LLC·Filed 2006·Granted Aug 11, 2009·1 cites·13 claims
- 1459US11175257B2Solid state sensor for metal ion detection and trapping in solutionWAFERTECH LLC·Filed 2018·Granted Nov 16, 2021·0 cites·20 claims
- 1559US9362443B2Solar cell with absorber layer with three dimensional projections for energy harvesting, and method for forming the sameWAFERTECH LLC·Filed 2013·Granted Jun 7, 2016·0 cites·23 claims
- 1657US9257515B2Split gate flash cell semiconductor deviceWAFERTECH LLC·Filed 2014·Granted Feb 9, 2016·0 cites·19 claims
- 1754US9147577B2Floating gate flash cell device and method for partially etching silicon gate to form the sameWAFERTECH LLC·Filed 2013·Granted Sep 29, 2015·0 cites·19 claims
- 1853US9618929B2Method and priority system for inventory management in semiconductor manufacturingWAFERTECH LLC·Filed 2014·Granted Apr 11, 2017·1 cites·19 claims
- 1952US10067084B2Solid state sensor for metal ion detection and trapping in solutionWAFERTECH LLC·Filed 2015·Granted Sep 4, 2018·0 cites·20 claims
- 2050US9564382B2Test structure for determining overlay accuracy in semiconductor devices using resistance measurementWAFERTECH LLC·Filed 2016·Granted Feb 7, 2017·0 cites·16 claims
- 2150US9261341B2Silicided MOS capacitor explosive device initiatorWAFERTECH LLC·Filed 2014·Granted Feb 16, 2016·0 cites·20 claims
- 2247US7127830B2Reticle carrier apparatus and method that tilts reticle for dryingWAFERTECH LLC·Filed 2004·Granted Oct 31, 2006·2 cites·22 claims
- 2346US10438826B2Fluid monitoring system and method for semiconductor fabrication toolsWAFERTECH LLC·Filed 2018·Granted Oct 8, 2019·0 cites·20 claims
- 2446US6129819AMethod for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gapsWAFERTECH LLC·Filed 1998·Granted Oct 10, 2000·14 cites·2 claims
- 2545US9312351B2Floating gate flash cell with extended floating gateWAFERTECH LLC·Filed 2014·Granted Apr 12, 2016·0 cites·20 claims
- 2645US9136271B2Semiconductor device with one-time programmable memory cell including anti-fuse with metal/polycide gateWAFERTECH LLC·Filed 2014·Granted Sep 15, 2015·0 cites·20 claims
- 2745US6669535B1Platform table for cleaning partsWAFERTECH LLC·Filed 2001·Granted Dec 30, 2003·7 cites·18 claims
- 2843US7142314B2Wafer stage position calibration method and systemWAFERTECH LLC·Filed 2003·Granted Nov 28, 2006·6 cites·26 claims
- 2942US9358555B2Threaded dispense nozzle and alignment method and device for photoresist and other fluid coatersWAFERTECH LLC·Filed 2014·Granted Jun 7, 2016·0 cites·22 claims
- 3041US9401367B2Nonvolatile memory cell with improved isolation structuresWAFERTECH LLC·Filed 2014·Granted Jul 26, 2016·0 cites·20 claims
- 3139US9520355B2Voltage and temperature independent MIM capacitorsWAFERTECH LLC·Filed 2014·Granted Dec 13, 2016·0 cites·20 claims
- 3239US2015236136A1Flash memory cell with floating gate with increased surface areaWAFERTECH LLC·Filed 2014·Application pending·0 cites
- 3337US9378954B2Plasma pre-treatment for improved uniformity in semiconductor manufacturingWAFERTECH LLC·Filed 2014·Granted Jun 28, 2016·0 cites·20 claims
- 3437US6942168B2Spray nozzle suitable for use in hot corrosive environments and method of useWAFERTECH LLC·Filed 2003·Granted Sep 13, 2005·5 cites·20 claims
- 3536US10115789B2Nonvolatile memory cell with improved isolation structuresWAFERTECH LLC·Filed 2016·Granted Oct 30, 2018·0 cites·21 claims
- 3635US2016181435A1Floating gate transistors and method for forming the sameWAFERTECH LLC·Filed 2015·Application pending·0 cites
- 3733US2010119351A1Method and system for venting load lock chamber to a desired pressureWAFERTECH LLC·Filed 2008·Application pending·0 cites
- 3833US2015228738A1Split-gate flash cell with composite control gate and method for forming the sameWAFERTECH LLC·Filed 2014·Application pending·0 cites
- 3931US9831087B2Split gate embedded flash memory and method for forming the sameWAFERTECH LLC·Filed 2016·Granted Nov 28, 2017·0 cites·20 claims
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