Assignee
WAKABAYASHI OSAMU
JP·7 granted patents·5 pending applications·33 citations·filing 2004–2014
Top patents by PatentIndex Score
12 records- 0195US9072153B2Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped targetWAKABAYASHI OSAMU·Filed 2012·Granted Jun 30, 2015·16 cites·20 claims
- 0279US8587863B2Wavelength conversion device, solid-state laser apparatus, and laser systemWAKABAYASHI OSAMU·Filed 2012·Granted Nov 19, 2013·4 cites·25 claims
- 0375US8817839B2Two-stage laser system for alignersWAKABAYASHI OSAMU·Filed 2012·Granted Aug 26, 2014·2 cites·8 claims
- 0474US9072152B2Extreme ultraviolet light generation system utilizing a variation value formula for the intensityWAKABAYASHI OSAMU·Filed 2012·Granted Jun 30, 2015·4 cites·10 claims
- 0564US8116347B2Two-stage laser system for alignersWAKABAYASHI OSAMU·Filed 2004·Granted Feb 14, 2012·5 cites·34 claims
- 0660US8804778B2Laser apparatus and extreme ultraviolet light source apparatusWAKABAYASHI OSAMU·Filed 2009·Granted Aug 12, 2014·1 cites·10 claims
- 0759US8804780B2Method for adjusting spectral line width of narrow-band laserWAKABAYASHI OSAMU·Filed 2007·Granted Aug 12, 2014·1 cites·19 claims
- 0855US2014369373A1Two-stage laser system for alignersWAKABAYASHI OSAMU·Filed 2014·Application pending·0 cites
- 0952US2014307244A1Method for adjusting spectrum width of narrow-band laserWAKABAYASHI OSAMU·Filed 2014·Application pending·0 cites
- 1039US2014084183A1Extreme ultraviolet light generation systemWAKABAYASHI OSAMU·Filed 2012·Application pending·0 cites
- 1139US2013094529A1Laser apparatus, method for generating laser beam, and extreme ultraviolet light generation systemWAKABAYASHI OSAMU·Filed 2012·Application pending·0 cites
- 1238US2013153794A1Extreme ultraviolet light generation apparatusWAKABAYASHI OSAMU·Filed 2011·Application pending·0 cites
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