Two-stage laser system for aligners

Abstract

The invention relates to a two-stage laser system well fit for semiconductor aligners, which is reduced in terms of spatial coherence while taking advantage of the high stability, high output efficiency and fine line width of the MOPO mode. The two-stage laser system for aligners comprises an oscillation-stage laser ( 50 ) and an amplification-stage laser ( 60 ). Oscillation laser light having divergence is used as the oscillation-stage laser ( 50 ), and the amplification-stage laser ( 60 ) comprises a Fabry-Perot etalon resonator made up of an input side mirror ( 1 ) and an output side mirror ( 2 ). The resonator is configured as a stable resonator.

1 - 45 . (canceled) 
     
     
         46 . A two-stage laser system comprising:
 an oscillation stage for producing laser light; and   an amplification stage for amplifying the laser light from the oscillation stage, the amplification stage comprising:
 a laser chamber including a pair of electrodes for exciting a laser gas in the laser chamber; and 
 a ring resonator comprising a first optical system and a second optical system between which the laser chamber is placed,
 the first and second optical systems configured to create first and second optical paths running, and crossing each other, between the pair of electrodes to allow the laser light to travel in the laser chamber from the first optical system to the second optical system along the first optical path and from the second optical system to the first optical system along the second optical path, 
 the first optical system configured to introduce the laser light from the oscillation stage to the laser chamber along the first path, partially return the laser light traveling along the second path to the laser chamber along the first path, and partially output from the two-stage laser system the laser light traveling along the second path from the second optical system, 
 the second optical system including a prism. 
 
   
     
     
         47 . The two-stage laser system according to  claim 46 , wherein the first and second optical paths are on the same plane between the pair of electrodes. 
     
     
         48 . The two-stage laser system according to  claim 46 , wherein the oscillation stage comprises:
 a laser chamber including an argon (Ar) gas and a fluorine (F 2 ) gas, and a pair of electrodes for exciting the gases to produce the laser light; and   a resonator including a line narrowing module for narrowing a spectral linewidth of the laser light to be produced.   
     
     
         49 . The two-stage laser system according to  claim 46 , wherein the laser light from the oscillation stage has a wavelength of 193.4 nm. 
     
     
         50 . The two-stage laser system according to  claim 46 , wherein the first optical system includes a partial reflecting mirror inclined with respect to the laser light from the oscillation stage. 
     
     
         51 . The two-stage laser system according to  claim 50 , wherein the first optical system further includes a mirror for reflecting the laser light from the partial reflecting mirror into the laser chamber along the first optical path. 
     
     
         52 . The two-stage laser system according to  claim 46 , wherein the laser gas in the laser chamber of the amplification stage includes an argon (Ar) gas and a fluorine (F 2 ) gas. 
     
     
         53 . The two-stage laser system according to  claim 46 , wherein the second optical system includes mirrors. 
     
     
         54 . A two-stage laser system for aligners, comprising:
 an oscillation-stage laser; and   an amplification-stage laser, wherein:   laser light output from said oscillation-stage laser is injected into said amplification-stage laser and is amplified therein,   said amplified laser light is output from the two-stage laser system,   said oscillation-stage laser and said amplification-stage laser each comprises a chamber filled with a laser gas,   said oscillation-stage laser oscillates laser light having divergence, and   said amplification-stage laser comprises a ring resonator comprising an input/output partial reflecting mirror and a prism for reflecting laser light entered via said partial reflecting mirror back to a position of said partial reflecting mirror.   
     
     
         55 . The two-stage laser system for aligners according to  claim 54 , wherein between said oscillation-stage laser and said amplification-stage laser there is located a conversion optical system having a function of compressing a beam shape of laser light oscillated out of said oscillation-stage laser.