Inventor · disambiguated record
Osamu Wakabayashi
Also filed as: WAKABAYASHI OSAMU
296 granted patents·102 pending applications·2,541 citations·filing 1987–2025
99Inventor score
Top patents by PatentIndex Score
398 records- 0197US9131589B2Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Granted Sep 8, 2015·23 cites·4 claims
- 0297US5142543AMethod and system for controlling narrow-band oscillation excimer laserKOMATSU MFG CO LTD·Filed 1989·Granted Aug 25, 1992·130 cites·17 claims
- 0396US8669543B2System and method for generating extreme ultraviolet light, and laser apparatusYANAGIDA TATSUYA·Filed 2011·Granted Mar 11, 2014·20 cites·27 claims
- 0496US4975919ALaser wavelength control apparatusKOMATSU MFG CO LTD·Filed 1988·Granted Dec 4, 1990·90 cites·17 claims
- 0595US12111577B2Line narrowing device, electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Oct 8, 2024·2 cites·20 claims
- 0695US10932350B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2019·Granted Feb 23, 2021·4 cites·19 claims
- 0795US9072153B2Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped targetWAKABAYASHI OSAMU·Filed 2012·Granted Jun 30, 2015·16 cites·20 claims
- 0895US8395133B2Apparatus and method of adjusting a laser light source for an EUV source deviceMORIYA MASATO·Filed 2009·Granted Mar 12, 2013·21 cites·27 claims
- 0995US8242472B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceMORIYA MASATO·Filed 2009·Granted Aug 14, 2012·37 cites·34 claims
- 1095US6721344B2Injection locking type or MOPA type of laser deviceKOMATSU MFG CO LTD·Filed 2002·Granted Apr 13, 2004·67 cites·8 claims
- 1195US5404366ANarrow band excimer laser and wavelength detecting apparatusKOMATSU MFG CO LTD·Filed 1994·Granted Apr 4, 1995·94 cites·19 claims
- 1295US5081635AApparatus for controlling output from an excimer laser deviceKOMATSU MFG CO LTD·Filed 1988·Granted Jan 14, 1992·82 cites·33 claims
- 1394US12300962B2Laser device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Granted May 13, 2025·1 cites·20 claims
- 1494US10172225B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2018·Granted Jan 1, 2019·5 cites·7 claims
- 1594US10038295B2Gas laser apparatusGIGAPHOTON INC·Filed 2017·Granted Jul 31, 2018·6 cites·14 claims
- 1694US9986629B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted May 29, 2018·5 cites·8 claims
- 1794US9265136B2System and method for generating extreme ultraviolet lightHORI TSUKASA·Filed 2012·Granted Feb 16, 2016·13 cites·17 claims
- 1894US8497489B2Chamber apparatus and method of maintaining target supply unitYABU TAKAYUKI·Filed 2011·Granted Jul 30, 2013·16 cites·4 claims
- 1994US5642374AExcimer laser deviceKOMATSU MFG CO LTD·Filed 1995·Granted Jun 24, 1997·111 cites·19 claims
- 2093US12438333B2Line narrowing gas laser device, wavelength control method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Oct 7, 2025·1 cites·20 claims
- 2193US12237640B2Line narrowing device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Feb 25, 2025·1 cites·5 claims
- 2293US9711934B2Laser apparatusGIGAPHOTON INC·Filed 2016·Granted Jul 18, 2017·7 cites·20 claims
- 2393US9509115B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2015·Granted Nov 29, 2016·5 cites·14 claims
- 2493US9130345B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2014·Granted Sep 8, 2015·10 cites·4 claims
- 2593US9113540B2System and method for generating extreme ultraviolet lightHORI TSUKASA·Filed 2012·Granted Aug 18, 2015·14 cites·33 claims
- 2692US11764541B2Laser system and method for manufacturing electronic deviceGIGAPHOTON INC·Filed 2021·Granted Sep 19, 2023·3 cites·20 claims
- 2792US5463650AApparatus for controlling output of an excimer laser deviceKOMATSU MFG CO LTD·Filed 1994·Granted Oct 31, 1995·86 cites·35 claims
- 2892US5373515ALaser wavelength controlling apparatusKOMATSU MFG CO LTD·Filed 1991·Granted Dec 13, 1994·114 cites·8 claims
- 2992US4856018ALight source for reduced projectionKOMATSU MFG CO LTD·Filed 1987·Granted Aug 8, 1989·68 cites·4 claims
- 3091US11804697B2Laser system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Oct 31, 2023·2 cites·20 claims
- 3191US9929529B2Solid-state laser system and laser apparatus used for exposure apparatusGIGAPHOTON INC·Filed 2017·Granted Mar 27, 2018·6 cites·18 claims
- 3291US9722384B2Gas laser apparatusGIGAPHOTON INC·Filed 2016·Granted Aug 1, 2017·4 cites·4 claims
- 3391US8957356B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2012·Granted Feb 17, 2015·8 cites·13 claims
- 3491US8872142B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Oct 28, 2014·9 cites·40 claims
- 3591US7903700B2Narrow-spectrum laser deviceKOMATSU MFG CO LTD·Filed 2005·Granted Mar 8, 2011·17 cites·3 claims
- 3691US4829536AMulti-mode narrow-band oscillation excimer laserKOMATSU MFG CO LTD·Filed 1987·Granted May 9, 1989·83 cites·2 claims
- 3790US9167678B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2014·Granted Oct 20, 2015·8 cites·16 claims
- 3890US8989225B2Laser apparatusKAKIZAKI KOUJI·Filed 2012·Granted Mar 24, 2015·11 cites·23 claims
- 3990US8399870B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceMORIYA MASATO·Filed 2012·Granted Mar 19, 2013·8 cites·17 claims
- 4090US8000361B2Laser systemKOMATSU MFG CO LTD·Filed 2009·Granted Aug 16, 2011·10 cites·25 claims
- 4190US7903715B2Slab type laser apparatusGIGAPHOTON INC·Filed 2009·Granted Mar 8, 2011·13 cites·11 claims
- 4290US6810061B2Discharge electrode and discharge electrode manufacturing methodKOMATSU MFG CO LTD·Filed 2002·Granted Oct 26, 2004·32 cites·20 claims
- 4390US6741627B2Photolithographic molecular fluorine laser systemUSHIO ELECTRIC INC·Filed 2002·Granted May 25, 2004·41 cites·14 claims
- 4489US10074956B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2016·Granted Sep 11, 2018·3 cites·8 claims
- 4589US9812841B2LasersystemGIGAPHOTON INC·Filed 2016·Granted Nov 7, 2017·5 cites·15 claims
- 4689US8610095B2Extreme ultraviolet light source deviceYABU TAKAYUKI·Filed 2010·Granted Dec 17, 2013·12 cites·13 claims
- 4788US9667019B2Laser apparatus and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2015·Granted May 30, 2017·4 cites·11 claims
- 4888US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 4987US12105425B2Exposure method, exposure system, and method for manufacturing electronic devicesGIGAPHOTON INC·Filed 2022·Granted Oct 1, 2024·1 cites·20 claims
- 5087US11217962B2Laser systemGIGAPHOTON INC·Filed 2019·Granted Jan 4, 2022·4 cites·4 claims
Showing the top 50 of 398 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →