Assignee
WURM STEFAN
US·2 granted patents·3 pending applications·2 citations·filing 2003–2012
Top patents by PatentIndex Score
5 records- 0167US8148821B2Dense seed layer and method of formationWURM STEFAN·Filed 2009·Granted Apr 3, 2012·2 cites·11 claims
- 0254US2010035431A1Reticle Stages for Lithography Systems and Lithography MethodsWURM STEFAN·Filed 2009·Application pending·0 cites
- 0351US8766447B2Dense seed layer and method of formationWURM STEFAN·Filed 2012·Granted Jul 1, 2014·0 cites·20 claims
- 0440US2008063982A1Fluids and methods of forming thereofWURM STEFAN·Filed 2006·Application pending·0 cites
- 0529US2006275928A1Semiconductor memory device and operating method for a semiconductor memory deviceWURM STEFAN·Filed 2003·Application pending·0 cites
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