Inventor
JANG GIL SUN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “JANG GIL SUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUGENE TECHNOLOGY CO LTD
3 patentsUS10145012B2Dec 4, 2018
Substrate processing apparatus and substrate processing method
EUGENE TECHNOLOGY CO LTD12 citations79
US10006121B2Jun 26, 2018
Method and apparatus for manufacturing three-dimensional-structure memory device
EUGENE TECHNOLOGY CO LTD1 citations50
US11242601B2Feb 8, 2022
Showerhead and substrate processing apparatus including the same
EUGENE TECHNOLOGY CO LTD0 citations44