Inventor
KOZUKA SHINICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KOZUKA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUSD793572SAug 1, 2017
Electrode plate for plasma processing apparatus
TOKYO ELECTRON LTD501 citations97
US8030216B2Oct 4, 2011
Method of making semiconductor device
TOKYO ELECTRON LTD2 citations58
US7405160B2Jul 29, 2008
Method of making semiconductor device
TOKYO ELECTRON LTD3 citations58
USD877079SMar 3, 2020
Electrode plate for plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US10861675B2Dec 8, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations49
US10204763B2Feb 12, 2019
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations49
US9653317B2May 16, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39
US9779962B2Oct 3, 2017
Plasma etching method
TOKYO ELECTRON LTD0 citations32