Inventor
NIITSUMA RYOSUKE
JP8 patents
Patents
8 patentsUSD793572SAug 1, 2017
Electrode plate for plasma processing apparatus
TOKYO ELECTRON LTD501 citations97
USD877079SMar 3, 2020
Electrode plate for plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US9653317B2May 16, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39
US10770268B2Sep 8, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38
US10707088B2Jul 7, 2020
Method of processing target object
TOKYO ELECTRON LTD0 citations37
US10692726B2Jun 23, 2020
Method for processing workpiece
TOKYO ELECTRON LTD0 citations37
US10192750B2Jan 29, 2019
Plasma processing method
TOKYO ELECTRON LTD0 citations33
US9922841B2Mar 20, 2018
Plasma processing method
TOKYO ELECTRON LTD0 citations29