Inventor · disambiguated record
Tino Hertzsch
Also filed as: HERTZSCH TINO
2 granted patents·1 pending application·10 citations·filing 2009–2011
54Inventor score
Top patents by PatentIndex Score
3 records- 0180US8563426B2Shrinkage of contact elements and vias in a semiconductor device by incorporating additional tapering materialCHUMAKOV DMYTRO·Filed 2011·Granted Oct 22, 2013·8 cites·10 claims
- 0260US8946019B2Semiconductor device comprising a buried capacitor formed in the contact levelCHUMAKOV DMYTRO·Filed 2010·Granted Feb 3, 2015·2 cites·16 claims
- 0344US2010055902A1Reducing critical dimensions of vias and contacts above the device level of semiconductor devicesFROHBERG KAI·Filed 2009·Application pending·0 cites
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