Inventor
SHONO ERIC KIHARA
US30 patents
⚠️ This page may combine multiple inventors who share the name “SHONO ERIC KIHARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
29 patentsUSD875053SFeb 11, 2020
Plasma connector liner
APPLIED MATERIALS INC13 citations85
US10752991B2Aug 25, 2020
Half-angle nozzle
APPLIED MATERIALS INC6 citations84
USD875054SFeb 11, 2020
Plasma connector liner
APPLIED MATERIALS INC10 citations84
USD875055SFeb 11, 2020
Plasma connector liner
APPLIED MATERIALS INC6 citations84
USD842259SMar 5, 2019
Plasma chamber liner
APPLIED MATERIALS INC7 citations84
USD838681SJan 22, 2019
Plasma chamber liner
APPLIED MATERIALS INC6 citations84
USD837754SJan 8, 2019
Plasma chamber liner
APPLIED MATERIALS INC6 citations84
US11732355B2Aug 22, 2023
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
APPLIED MATERIALS INC5 citations74
US11634813B2Apr 25, 2023
Half-angle nozzle
APPLIED MATERIALS INC2 citations73
US11220746B2Jan 11, 2022
Half-angle nozzle
APPLIED MATERIALS INC2 citations73
USD818447SMay 22, 2018
Plasma feedthrough flange
APPLIED MATERIALS INC4 citations73
US11959169B2Apr 16, 2024
Asymmetric injection for better wafer uniformity
APPLIED MATERIALS INC2 citations72
US11501954B2Nov 15, 2022
Dogbone inlet cone profile for remote plasma oxidation chamber
APPLIED MATERIALS INC1 citations72
US11486038B2Nov 1, 2022
Asymmetric injection for better wafer uniformity
APPLIED MATERIALS INC3 citations72
USD924825SJul 13, 2021
Chamber inlet
APPLIED MATERIALS INC2 citations72
US11049696B2Jun 29, 2021
Dogbone inlet cone profile for remote plasma oxidation chamber
APPLIED MATERIALS INC3 citations72
US10847337B2Nov 24, 2020
Side inject designs for improved radical concentrations
APPLIED MATERIALS INC2 citations72
US10636626B2Apr 28, 2020
Dogbone inlet cone profile for remote plasma oxidation chamber
APPLIED MATERIALS INC3 citations72
USD1023987SApr 23, 2024
Chamber inlet
APPLIED MATERIALS INC0 citations62
US11529592B2Dec 20, 2022
Gas injector with baffle
APPLIED MATERIALS INC0 citations62
US11501945B2Nov 15, 2022
Side inject designs for improved radical concentrations
APPLIED MATERIALS INC1 citations62
US11077410B2Aug 3, 2021
Gas injector with baffle
APPLIED MATERIALS INC1 citations62
USD882536SApr 28, 2020
Plasma source liner
APPLIED MATERIALS INC1 citations62
US11885021B2Jan 30, 2024
Gas supply member with baffle
APPLIED MATERIALS INC0 citations61
US11124878B2Sep 21, 2021
Gas supply member with baffle
APPLIED MATERIALS INC0 citations61
US11081340B2Aug 3, 2021
Argon addition to remote plasma oxidation
APPLIED MATERIALS INC0 citations61
US10636650B2Apr 28, 2020
Argon addition to remote plasma oxidation
APPLIED MATERIALS INC1 citations61
US11615944B2Mar 28, 2023
Remote plasma oxidation chamber
APPLIED MATERIALS INC0 citations51
US12559841B2Feb 24, 2026
Plenum driven hydroxyl combustion oxidation
APPLIED MATERIALS INC0 citations47