Inventor
SHIOZAWA TAKAHISA
JP22 patents
Patents
22 patentsUS6636295B2Oct 21, 2003
Exposure apparatus and device manufacturing method
CANON KK89 citations98
US4974919ADec 4, 1990
Illuminating device
CANON KK191 citations98
US5892573AApr 6, 1999
Exposure apparatus and method with multiple light receiving means
CANON KK58 citations96
US5726740AMar 10, 1998
Projection exposure apparatus having illumination device with ring-like or spot-like light source
CANON KK48 citations96
US5684567ANov 4, 1997
Exposure apparatus and device manufacturing method for projecting light from a secondary light source onto a mask or pattern
CANON KK63 citations96
US5475491ADec 12, 1995
Exposure apparatus
CANON KK70 citations96
US5459547AOct 17, 1995
Illumination device
CANON KK78 citations96
US5345292ASep 6, 1994
Illumination device for projection exposure apparatus
CANON KK98 citations96
US5140366AAug 18, 1992
Exposure apparatus with a function for controlling alignment by use of latent images
CANON KK59 citations95
US5121160AJun 9, 1992
Exposure method and apparatus
CANON KK85 citations95
US7345741B2Mar 18, 2008
Illumination optical system and exposure apparatus
CANON KK33 citations92
US5719617AFeb 17, 1998
Illumination system for superposing light beams one upon another on a surface using a projecting system having different focal point positions
CANON KK26 citations92
US5699148ADec 16, 1997
Exposure apparatus and microdevice manufacturing method using the same
CANON KK25 citations92
US5491534AFeb 13, 1996
Exposure apparatus and microdevice manufacturing method using the same
CANON KK34 citations92
US7142283B2Nov 28, 2006
Exposure apparatus
CANON KK6 citations74
US6897944B2May 24, 2005
Illumination optical system, exposure method and apparatus using the same
CANON KK9 citations74
US5621499AApr 15, 1997
Scanning exposure apparatus
CANON KK17 citations74
US7468781B2Dec 23, 2008
Exposure apparatus
CANON KK4 citations63
US7286206B2Oct 23, 2007
Exposure apparatus
CANON KK2 citations63
US6757050B1Jun 29, 2004
Exposure method and apparatus for detecting an exposure amount and for calculating a correction value based on the detected exposure amount
CANON KK4 citations63
US7760330B2Jul 20, 2010
Illumination optical system and exposure apparatus
CANON KK0 citations52
US7671967B2Mar 2, 2010
Exposure apparatus and exposure method
CANON KK1 citations51