Inventor
SUGAYA ISAO
JP37 patents
⚠️ This page may combine multiple inventors who share the name “SUGAYA ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
30 patentsUS5872417AFeb 16, 1999
Multiple degrees of freedom vibration actuator
NIKON CORP40 citations92
US5870634AFeb 9, 1999
Image blur suppression device utilizing a vibration motor
NIKON CORP21 citations92
US9919508B2Mar 20, 2018
Substrate aligning apparatus, substrate bonding apparatus, substrate aligning method and substrate bonding method
NIKON CORP10 citations84
US5831370ANov 3, 1998
Vibration actuator
NIKON CORP17 citations84
US5723935AMar 3, 1998
Vibration driven motor
NIKON CORP18 citations84
US11004686B2May 11, 2021
Bonding method, bonding device, and holding member
NIKON CORP7 citations82
US9539800B2Jan 10, 2017
Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate
NIKON CORP9 citations82
US11842905B2Dec 12, 2023
Stacked substrate manufacturing method, stacked substrate manufacturing apparatus, stacked substrate manufacturing system, and substrate processing apparatus
NIKON CORP6 citations74
US5854529ADec 29, 1998
Vibration actuator
NIKON CORP15 citations74
US5763981AJun 9, 1998
Vibration actuator
NIKON CORP9 citations74
US11211338B2Dec 28, 2021
Apparatus for stacking substrates and method for the same
NIKON CORP2 citations73
US10483212B2Nov 19, 2019
Apparatus for stacking substrates and method for the same
NIKON CORP4 citations73
US10026768B2Jul 17, 2018
Detector, detector with lock-in amplifier, substrate, and method for manufacturing a detector
NIKON CORP5 citations73
US10182190B2Jan 15, 2019
Light detecting apparatus, image capturing apparatus and image sensor
NIKON CORP3 citations72
US6611081B1Aug 26, 2003
Vibration actuator with two vibration modes
NIKON CORP7 citations72
US5892316AApr 6, 1999
Vibration actuator
NIKON CORP4 citations63
US12506111B2Dec 23, 2025
Alignment method and alignment apparatus
NIKON CORP0 citations62
US12100667B2Sep 24, 2024
Apparatus for stacking substrates and method for the same
NIKON CORP0 citations62
US11823935B2Nov 21, 2023
Stacking apparatus and stacking method
NIKON CORP0 citations62
US11362059B2Jun 14, 2022
Manufacturing method and manufacturing apparatus for stacked substrate, and program
NIKON CORP0 citations62
US10825707B2Nov 3, 2020
Stacking apparatus and stacking method
NIKON CORP1 citations62
US8856722B2Oct 7, 2014
System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates
NIKON CORP2 citations62
US7189155B2Mar 13, 2007
Polishing body, polishing apparatus, semiconductor device, and semiconductor device manufacturing method
NIKON CORP5 citations61
US12080554B2Sep 3, 2024
Bonding method, bonding device, and holding member
NIKON CORP0 citations60
US11791223B2Oct 17, 2023
Substrate bonding apparatus and substrate bonding method
NIKON CORP1 citations56
US9159640B2Oct 13, 2015
Semiconductor device and method for manufacturing the semiconductor device
NIKON CORP1 citations52
US8370789B2Feb 5, 2013
System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates
NIKON CORP0 citations52
US12165902B2Dec 10, 2024
Substrate bonding apparatus and substrate bonding method
NIKON CORP0 citations51
US12107068B2Oct 1, 2024
Method and device for manufacturing stacked substrate
NIKON CORP0 citations51
US10424557B2Sep 24, 2019
Substrate bonding apparatus and substrate bonding method
NIKON CORP0 citations51
SUGAYA ISAO
6 patentsUS8436680B2May 7, 2013
Multi-layered semiconductor apparatus
SUGAYA ISAO2 citations62
US8436465B2May 7, 2013
Semiconductor device and method for manufacturing the semiconductor device
SUGAYA ISAO4 citations61
US8878358B2Nov 4, 2014
Semiconductor device
SUGAYA ISAO0 citations51
US8299848B2Oct 30, 2012
Multi-layered semiconductor apparatus
SUGAYA ISAO0 citations51
US8183686B2May 22, 2012
Semiconductor device
SUGAYA ISAO0 citations51
US9054140B2Jun 9, 2015
Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devices
SUGAYA ISAO0 citations37