Inventor

SWARTZ DENNIS C

US5 patents

⚠️ This page may combine multiple inventors who share the name “SWARTZ DENNIS C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

4 patents

US5782980AJul 21, 1998

Low pressure chemical vapor deposition apparatus including a process gas heating subsystem

ADVANCED MICRO DEVICES INC53 citations87

US6270580B2Aug 7, 2001

Modified material deposition sequence for reduced detect densities in semiconductor manufacturing

ADVANCED MICRO DEVICES INC10 citations71

US6589350B1Jul 8, 2003

Vacuum processing chamber with controlled gas supply valve

ADVANCED MICRO DEVICES INC10 citations70

US5528226AJun 18, 1996

Apparatus and method for controlling the burn-off operation of a gas in a semiconductor wafer fabrication furnace

ADVANCED MICRO DEVICES INC6 citations61

ADVANCE MICRO DEVICES INC

1 patent

US6814837B1Nov 9, 2004

Controlled gas supply line apparatus and process for infilm and onfilm defect reduction

ADVANCE MICRO DEVICES INC5 citations54